2022
DOI: 10.1016/j.apsusc.2021.152103
|View full text |Cite
|
Sign up to set email alerts
|

Evolution of nanodiamond seeds during the chemical vapor deposition of diamond on silicon substrates in oxygen-rich plasmas

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2
1
1
1

Citation Types

1
13
0

Year Published

2022
2022
2024
2024

Publication Types

Select...
6
1

Relationship

1
6

Authors

Journals

citations
Cited by 14 publications
(14 citation statements)
references
References 92 publications
1
13
0
Order By: Relevance
“…For polycrystalline diamond deposition on seeded substrates under harsh conditions, we previously showed that incubation is present due to seed etching. 8 However, under mild conditions similar to those used in this work, incubation has never been corroborated (to the best of our knowledge). 47,48…”
Section: Resultsmentioning
confidence: 64%
See 3 more Smart Citations
“…For polycrystalline diamond deposition on seeded substrates under harsh conditions, we previously showed that incubation is present due to seed etching. 8 However, under mild conditions similar to those used in this work, incubation has never been corroborated (to the best of our knowledge). 47,48…”
Section: Resultsmentioning
confidence: 64%
“…For polycrystalline diamond deposition on seeded substrates under harsh conditions, we previously showed that incubation is present due to seed etching. 8 However, under mild conditions similar to those used in this work, incubation has never been corroborated (to the best of our knowledge). 47,48 Quantitative results are obtained by non-linear least-square tting of ( 15) with the values v d = 0.6 nm min −1 , n p = 2.41, n g = 1, and l 0 = 532 nm and tting parameters n 2D , a 0 , and V 0 .…”
Section: Experimental Verication Of the Modelmentioning
confidence: 64%
See 2 more Smart Citations
“…Hydrogen is converted into atomic hydrogen that has a preferential etching for sp 2 bonded carbon enabling faster growth of better quality diamond material and also provides the abstraction of hydrogen from growth surface exposing dangling bonds for the maintenance of growth process 13 . Other process gases are also studied for different purposes, nitrogen for example is known to provide better growth rates for [100] oriented diamond films and single crystals 23 , oxygen is often used as a strategy to enhance quality of the crystals [24][25][26] .…”
Section: Introductionmentioning
confidence: 99%