1997
DOI: 10.1016/s0022-0248(96)00563-5
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Evolution of the microstructure of oxide thin films

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Cited by 32 publications
(21 citation statements)
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“…Above that temperature, however, peaks became slightly broader again, and a slightly preferred (100) orientation developed. Similar observations have been reported for ceria thin films deposited by MOCVD, where the FWHM depended on film thickness and growth rate [34].…”
Section: Resultssupporting
confidence: 88%
“…Above that temperature, however, peaks became slightly broader again, and a slightly preferred (100) orientation developed. Similar observations have been reported for ceria thin films deposited by MOCVD, where the FWHM depended on film thickness and growth rate [34].…”
Section: Resultssupporting
confidence: 88%
“…3,6 As the streaking direction is perfectly parallel to ͓001͔, the defect plane is therefore perpendicular to ͓001͔. Two-component line shapes have been reported for a variety of epitaxial thin films, semiconductors, 32-34 metals, [35][36][37] and oxides, [38][39][40] and they are in general interpreted in terms of dislocations. Curved planar defects or planar defects inclined with respect to the surface would produce broadening of the reflection in the in-plane direction or inclined streaking, respectively.…”
Section: Methodsmentioning
confidence: 99%
“…For the film grown at 750 ºC it consists of two different components (see fig.1b). A sharp peak, which corresponds to an atomically long-range ordered area inside the film and a broad peak, which reflects a mosaic structure [26,[31][32][33][34][35]. As the growth temperature decreases, the sharp peak disappears and the width of the broad peak increases (Fig.…”
Section: Characterization and Dielectric Measurementsmentioning
confidence: 99%