Evolutionary algorithms for compact thermal modelling of microsystems: application to a micro-pyrotechnic actuator

Abstract

In this work, we approach the problem of extracting a dynamic multiport thermal compact model from thermal impedance transients of microsystems using genetic algorithms. The model takes the form of a unique RC network, using a thermal-electrical analogy. The model topology is codified in a binary chromosoma and nonlinear least squares is used for sizing their components. The compact model topology evolution is genetically controlled to obtain the RC network that minimizes the reconstruction error of the thermal impedance transients. As an example, the proposed methodology is applied to an innovative silicon microthruster and compared with random search and sequential forward selection.

Dynamic electro-thermal simulation of microsystems—a review

“…The increased gas pressure actuates a diaphragm. This deflection can be used in micropumps and microvalves [36] - [41] as components of micro-fluidic systems. [43], may degrade the device's performance.…”

“…in [41] have suggested the application of evolutionary algorithms for setting the correct topology of the compact model. Special challenge in dynamic compact thermal modeling, is to construct a boundary condition independent compact model, which would be reusable for different surroundings.…”

Reduced order thermal modeling of a one-dimensional electrothermally actuated micromirror device

“…Several electrothermally driven MEMS devices such as micromirrors [1]- [4], variable optical attenuators [5], RF switches [6], and microthrusters [7] have been reported in literature. Thermal modeling of electrothermally actuated MEMS devices is necessary for optimizing performance and ensuring proper thermal management.…”

Dynamic compact thermal models with multiple power sources: application to an ultrathin chip stacking technology

“…In some cases, even the operation principle relies on thermal dynamics. Examples are thermal actuators like micropumps [5], active valves [6], shape-memory alloy-based actuators [7], bimetallic-based actuators [8], micropyrotechnic actuators [9], or thermal ink jet heads [10]. For sensors, a typical example is temperature-modulated gas sensors on micromachined hot-plates [11].…”