Examination of dielectric strength of thin Parylene C films under various conditions

Heid, Andreas; Metzen, René von; Stett, Alfred; Bucher, Volker

doi:10.1515/cdbme-2016-0012

Cited by 9 publications

(6 citation statements)

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“…The gate leakage current remains below 10 pA for V GAA < +5.5 V and increases drastically at V GAA ∼ +6 V, causing irreversible failure of the parylene insulator. The calculated breakdown field accounting for geometry is 240–300 mV/nm, which compares well with previous measurements of the breakdown field for parylene C thin films …”

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confidence: 85%

“…The calculated breakdown field accounting for geometry is 240 − 300 mV/nm, which compares well with previous measurements of the breakdown field for Parylene-C thin-films. 49 We finish by exploring the potential for using parylene to obtain InAs NWFETs with chemically-treated InAs surfaces. The possible benefits are surface-state passivation for improved gate performance 51,52 and threshold voltage tuning using charged adsorbate molecules.…”

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confidence: 99%

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Using Ultrathin Parylene Films as an Organic Gate Insulator in Nanowire Field-Effect Transistors

et al. 2018

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We report the development of nanowire field-effect transistors featuring an ultrathin parylene film as a polymer gate insulator. The room temperature, gas-phase deposition of parylene is an attractive alternative to oxide insulators prepared at high temperatures using atomic layer deposition. We discuss our custom-built parylene deposition system, which is designed for reliable and controlled deposition of <100 nm thick parylene films on III-V nanowires standing vertically on a growth substrate or horizontally on a device substrate. The former case gives conformally coated nanowires, which we used to produce functional Ω-gate and gate-all-around structures. These give subthreshold swings as low as 140 mV/dec and on/off ratios exceeding 10 at room temperature. For the gate-all-around structure, we developed a novel fabrication strategy that overcomes some of the limitations with previous lateral wrap-gate nanowire transistors. Finally, we show that parylene can be deposited over chemically treated nanowire surfaces, a feature generally not possible with oxides produced by atomic layer deposition due to the surface "self-cleaning" effect. Our results highlight the potential for parylene as an alternative ultrathin insulator in nanoscale electronic devices more broadly, with potential applications extending into nanobioelectronics due to parylene's well-established biocompatible properties.

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confidence: 85%

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confidence: 99%

Using Ultrathin Parylene Films as an Organic Gate Insulator in Nanowire Field-Effect Transistors

et al. 2018

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“…[5,71] The elastomers showed 10 times higher μ k than that of the glass due to their large deformability and surface adhesion, whereas the plastics had μ k similar to the glass. We chose parylene C for the top insulating layer because it is a common dielectric material and quite desirable in this study in many aspects of transparency, high dielectric constant, low kinetic frictional coefficient (Figure 2C), excellent flexibility, high breakdown voltage, [72][73][74][75] and easy deposition process for conformal coatings. The parylene C could create a continuous film on the rough EL layer surface via chemical vapor deposition (CVD), [72] which is essential in this study.…”

Section: Materials Design For the O-ev Devicementioning

confidence: 99%

Intrinsically Synchronized Flexible Visuo‐Haptic Device Operated by Single External Electric Field

Lee

Park

et al. 2023

Advanced Optical Materials

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A few studies have demonstrated a simultaneous supply of tactile stimulation with optical expression from separate device components. [32,37] However, intrinsic coupling of optical expression and tactile stimulation in a single device has never been achieved, which is mainly because the operating mechanisms of tactile stimulation and visual expression are completely different. Integrating the opto-tactile information in a single material by a single operation is advantageous for synchronized multisensory expression.To date, the dominant means for tactile sensory information has been generated by using mechanical actuators such as indentors, [38,39] motors, [40,41] and piezoelectric devices. [42,43] Mechanical tactile stimulation provides natural tactile sensations that can be applied to the skin; however, it requires a complicated device structure or bulky design. [1,17] Furthermore, those types of haptic actuators cannot present localized haptic sensations on the contact skin. For all these reasons, several haptic researches have introduced the concept of surface haptics. The goal of surface haptics is to generate tactile effects on touch surfaces. One of the technologies for surface haptics is electrovibration (EV). [44][45][46] In the EV, no haptic effect occurs on the surface when the finger (or any conductor) is not in contact, even though electrical input is applied. However, when human touches and slides the surface, an electrostatic attraction force is generated from the electroadhesion phenomenon between the contact finger and the surface; then, the human feels the modulated frictional force. Furthermore, when the alternating current (AC) input is applied to the surface, the frictional force fluctuates in the form of oscillating attributes. The dynamic frictional force can be felt as vibration, and those vibration effects are called electrovibration. Because EV occurs only while a conductor is in contact with the surface, the concept differs from the widely used mechanical tactile actuators. For tactile expression, EV has several advantages; 1) it does not require a bulky structured actuation mechanism, e.g., a vibration motor or linear resonance actuator (LRA), 2) it generates localized vibration to the contact finger on the surface.Despite the recent remarkable advances in EV, [47][48][49][50][51][52][53][54][55][56][57] general EV devices have been confined to a rigid property because of the thin glass layer. And they requested external optical devices for the simultaneous expression of optical and tactile information. Consequently, designing a flexible opto-haptic multimodality device with a simple structure is highly desirable for fruitful haptic interactions. In this study, we present a synchronized Providing multisensory expression in a synchronized form helps human perception in human-machine interfaces. Synchronized visuo-haptic integration has been relatively less explored because the two expressions operate by different principles. This study demonstrates a flexible visuo-haptic device that ge...

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“…The 3D-printed endcaps were adhered to both ceramic plates on the ends of the piezoelectric stack. These endcaps were printed using the FormLabs Dental LT resin and attached to the ceramic ends of the piezoelectric stack using TS10 Torr [26] depending on its surrounding conditions. Therefore, the 25 µm Parylene-C coating can withstand up to at least 3000 V, which is much higher than the expected excitation voltage of up to 75 V. The surgical procedure is similar to that described in previous works [16,27].…”

Section: Femoral Fixator Designmentioning

confidence: 99%

A piezoelectric bone fixation plate for in vivo application and monitoring of mechanical loading during fracture healing

Nelson

Karipott

Guldberg

et al. 2020

Meas. Sci. Technol.

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Fracture non-union, the failure of a bone fracture to bridge, occurs in roughly 5%–10% of treated fractures and requires lengthy and expensive follow-up interventions. A significant body of research has investigated the efficacy of low-magnitude, high-frequency (LMHF) vibration as a treatment for femoral non-unions through the use of whole-body vibration. This work presents a novel piezoelectric fixation plate for investigating the efficacy of LMHF treatment by applying loads directly to the fracture site, thus reducing undesired systemic effects such as hormonal up-regulation induced by whole-body vibration. The fixation plate can apply mechanical loading in the LMHF regime and monitor the mechanical environment at the fracture site during ambulation to quantify progressive changes in callus stiffness over time as an indication of healing. Mechanical testing demonstrated the ability of the plate to provide displacements of up to 10 µm, as well as to estimate the changing stiffness of the fracture environment.

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Examination of dielectric strength of thin Parylene C films under various conditions

Abstract: The breakdown voltage of the biocompatible polymer Parylene C was determined after storage in 60°C saline solution and treatment by autoclave. It occurred that both, storage at 60°C in saline solution and autoclaving, lead to distinct decrease of dielectric strength by approximately 50%.

Cited by 9 publications

References 5 publications

Using Ultrathin Parylene Films as an Organic Gate Insulator in Nanowire Field-Effect Transistors

Using Ultrathin Parylene Films as an Organic Gate Insulator in Nanowire Field-Effect Transistors

Intrinsically Synchronized Flexible Visuo‐Haptic Device Operated by Single External Electric Field

A piezoelectric bone fixation plate for in vivo application and monitoring of mechanical loading during fracture healing

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