Transmission electron microscopy has been used to study the effect of total dose on the depth distribution of cavities (voids or bubbles) in nickel irradiated at 500°C with 20-keV 4He + ions. A transverse sectioning technique allowed us to obtain the entire depth distribution of cavities from a single specimen. The diameter, number density and volume fraction of cavities were measured as a function of depth from micrographs taken from samples sectioned parallel to the direction of the incident beam. The results for the doses at 2.9 x 10 15 and 2.9 x 1016 ions/;m 2 show an increase in the average cavity diameter, number density and volume fraction with increasing dose. A further increase in dose from 2.9 x 10^ to 2.9 x 10*7 ions/cm 2 also shows an increase in the average cavity diameter but a decrease in the number density. This observation is interpreted as evidence for the coalescence of cavities.1.