Experimental and theoretical study of InP homoepitaxy by chemical vapour deposition from gaseous indium chloride and hydrogen diluted phosphine

Chaput, Louise; Cadoret, R.; Mihailovic, M.

doi:10.1016/0022-0248(91)90125-o

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Cited by 16 publications

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“…The control of the extraneous deposit was studied versus the HCl added in the main nitrogen flow at constant total flow, noted HCl add , to decrease the supersaturation in the mixing zone. This method had been very effective for growing InP [4], GaInAs [5,6] or GaAs [1,7]. In order to have supersaturation high enough to obtain growth, the HCl flow on the liquid gallium is fixed to 30 sccm mixed with 73 sccm of …”

Section: Resultsmentioning

confidence: 99%

Experimental and Theoretical Study of the Growth of GaN on Sapphire by HVPE

Trassoudaine

Aujol

Disseix

et al. 1999

phys. stat. sol. (a)

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confidence: 99%

Experimental and Theoretical Study of the Growth of GaN on Sapphire by HVPE

Trassoudaine

Aujol

Disseix

et al. 1999

phys. stat. sol. (a)

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“…For the undoped InP growth, Chaput et al suggested a mechanism with P-In-Cl as an intermediate component on the surface. 8 The Cl removal is then the limiting step. We add to this mechanism the Cp adsorption.…”

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confidence: 99%

Kinetic Study of InP:Fe Growth by LP-HVPE with Ferrocene as Fe Source

Jahan

Söderström

Lourdudoss

2000

J. Electrochem. Soc.

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A kinetic study of InP:Fe growth has been carried out in a low pressure hydride vapor phase epitaxy (LP-HVPE) reactor using ferrocene as iron source. The influence of the ferrocene partial pressure on the growth behavior has been investigated. A drastic decrease of the growth rate in the presence of ferrocene has been experimentally measured. This effect is explained to be due to cyclopentadiene adsorption. A kinetic model, that takes into account this adsorption, is proposed, which explains the observed experimental results.

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“…'° phosphine is adsorbed on free sites and forms either PH* (when PH, is in 8 = in S + 4 in T -40.2 + (52388.26/fl [19] diluted with hydrogen) or Pt (when PH, is pure). However, in K = in S + 4 in T -38 9 + (45802 01/fl [20] authors consider that both PH and P, are in gaseous phase 8…”

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confidence: 99%