2010
DOI: 10.1117/12.860614
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Experimental demonstration of on-chip optical parametric oscillation in planar tantalum pentoxide waveguides

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“…2 5 Ta O also has the advantage that the fabrication process is well-known as it is commonly used as a high-k material in the microelectronics industry [17][18][19][20].…”
mentioning
confidence: 99%
“…2 5 Ta O also has the advantage that the fabrication process is well-known as it is commonly used as a high-k material in the microelectronics industry [17][18][19][20].…”
mentioning
confidence: 99%