Experimental determination of critical adhesion energies with the Advanced Button Shear Test

Pflügler, Nadine; Reuther, Georg M.; Goroll, Michael; Udiljak, Dominik; Pufall, Reinhard; Wunderle, Bernhard

doi:10.1016/j.microrel.2019.06.001

Cited by 10 publications

(1 citation statement)

References 3 publications

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“…However, the pronounced force-dependent stiffness of the small cartridge leads to non-reliable displacement measurements. A multipoint calibration may reduce this effect, but there are several other system-dependent influences on the displacement measurement 45 . Therefore, no quantitative evaluation of the displacement was performed, but F C was extracted only from the force data.…”

Section: Resultsmentioning

confidence: 99%

Button shear testing for adhesion measurements of 2D materials

Schätz,

Nayi,

Weber

et al. 2024

Nat Commun

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Two-dimensional (2D) materials are considered for numerous applications in microelectronics, although several challenges remain when integrating them into functional devices. Weak adhesion is one of them, caused by their chemical inertness. Quantifying the adhesion of 2D materials on three-dimensional surfaces is, therefore, an essential step toward reliable 2D device integration. To this end, button shear testing is proposed and demonstrated as a method for evaluating the adhesion of 2D materials with the examples of graphene, hexagonal boron nitride (hBN), molybdenum disulfide, and tungsten diselenide on silicon dioxide and silicon nitride substrates. We propose a fabrication process flow for polymer buttons on the 2D materials and establish suitable button dimensions and testing shear speeds. We show with our quantitative data that low substrate roughness and oxygen plasma treatments on the substrates before 2D material transfer result in higher shear strengths. Thermal annealing increases the adhesion of hBN on silicon dioxide and correlates with the thermal interface resistance between these materials. This establishes button shear testing as a reliable and repeatable method for quantifying the adhesion of 2D materials.

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Section: Resultsmentioning

confidence: 99%