Experimental Investigation of Dynamic Characteristics of Metal Coated Buckled Micro-Beams with Electrothermal Modulation of Residual Stress

Behera, Amruta Ranjan; Shaik, Habibuddin; Rao, G. Mohan; Pratap, Rudra

doi:10.1109/icee44586.2018.8937895

Cited by 2 publications

(2 citation statements)

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“…The static and dynamic behaviours of electrothermally actuated in-plane micro-beams, have been extensively investigated [27][28][29][30][31][32] . In a previous work 2 , we exploited the buckling point of heated straight micro-beam to demonstrate highly sensitive and scalable pressure sensor.…”

Section: Introductionmentioning

confidence: 99%

A highly sensitive and wide-range resonant magnetic micro-sensor based on a buckled micro-beam

Alcheikh

Mbarek

Ouakad

et al. 2021

Sensors and Actuators A: Physical

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We experimentally demonstrate a miniature highly sensitive wide-range resonant magnetic Lorentz-force micro-sensor. The concept is demonstrated based on the detection of the resonance frequency of an inplane electrothermally heated straight resonator operated near the buckling point. The frequency shift is measured with optical sensing and the device is operating at atmospheric pressure. The magnetometer demonstrates a sensitivity (S) of 33.9/T, which is very high compared to the state of the art. In addition, the micro-sensor shows a good linearity in wide range and low power consumption around 0.2 mW. The above performances make the proposed micro-sensor promising for various low-cost magnetic applications.

show abstract

Section: Introductionmentioning

confidence: 99%

A highly sensitive and wide-range resonant magnetic micro-sensor based on a buckled micro-beam

Alcheikh

Mbarek

Ouakad

et al. 2021

Sensors and Actuators A: Physical

View full text Add to dashboard Cite

show abstract

Section: Introductionmentioning

confidence: 99%

A Highly Sensitive and Wide-Range Resonant Magnetic Micro-Sensor Based on A Buckled Micro-Beam

Alcheikh

Mbarek

Younis

2020

Preprint

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We experimentally demonstrate a miniature highly sensitive wide-range resonant magnetic Lorentz-force micro-sensor. The concept is demonstrated based on the detection of the resonance frequency of an in-plane electrothermally heated straight resonator operated near the buckling point. The frequency shift is measured with optical sensing and the device is operating at atmospheric pressure. The magnetometer demonstrates a sensitivity (S) of 33.9/T, which is very high compared to the state of the art. In addition, the micro-sensor shows a good linearity in wide range and low power consumption around 0.2 mW. The above performances make the proposed micro-sensor promising for various low-cost magnetic applications.

show abstract

Experimental Investigation of Dynamic Characteristics of Metal Coated Buckled Micro-Beams with Electrothermal Modulation of Residual Stress

Cited by 2 publications

References 7 publications

A highly sensitive and wide-range resonant magnetic micro-sensor based on a buckled micro-beam

A highly sensitive and wide-range resonant magnetic micro-sensor based on a buckled micro-beam

A Highly Sensitive and Wide-Range Resonant Magnetic Micro-Sensor Based on A Buckled Micro-Beam

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