In this paper, a novel silicon carbide (SiC) trench metal oxide semiconductor field effect transistor (MOSFET) with improved reverse recovery charge and switching energy loss is proposed and investigated utilising ISE-TCAD simulations. The proposed structure features an integrated Schottky barrier diode on one side-wall of the trench below the P-base region, and an inserted thicker oxide layer between the polysilicon gate and source metal on one side-wall of the trench. The simulation results show that compared with Infineon's CoolSiC™ Trench MOSFET, the proposed device decreases the gate charge Q g by 29.2%, leading to significantly improved figures of merit (R on,sp × Q g ). The reverse recovery charge Q rr and peak reverse recovery current (I RRM ) are reduced by 64.1% and 66.0%, respectively. Meanwhile, the total switching energy loss decreases 36.7% for the dynamic performance. How to cite this article: Liu S., et al.: A novel SiC trench MOSFET with integrated Schottky barrier diode for improved reverse recovery charge and switching loss.