“…Figure 5 shows the energy dispersive spectrometer (EDS, OCTANE SUPER-A, EDAX AMETEK, Mahwah, NJ, USA) analysis results at given sidewall positions. It seems that the intensity of oxygen (O) is slightly less in the semi-water-assisted trepanning results compared with the direct trepanning case, which may be attributable to the effective removal of the molten and oxide layers that are induced by laser irradiation via laser-caused mechanical effect in water, such as strengthened shockwaves and high-pressure waterjets originating from water-confined plasma expansion and dynamic bubble collapse [25,26,27,28]. Figure 6 depicts the exit details of the trepanning results, where it can be clearly seen that direct laser trepanning leads to a quite small exit, and therefore a large hole taper is expected, while SWILT is associated with a wider exit and hence a quite straight sidewall, although the roundness is not as good as in the direct trepanning case.…”