urgency, and provided a 'beyond CMOS' strategy. In 2008, ITRS suggested industry community to find new emerging materials and devices to replace the state-of-theart silicon and sustain Moore's law. [12][13][14][15] Among emerging channel materials for exploring aggressively scaled MOS FETs, single-walled carbon nanotube (SWCNT) is a strong competitor due to its extremely high carrier mobility, ultrathin body, and excellent stability. [16][17][18][19][20] Its quasi 1D body can provide much better electrostatic gate control on the channel than Si and other semiconductors counterparts (e.g., III-V compounds or Ge). [21][22][23] Since the first demonstration of the carbon nanotube field effect transistor (CNT FET) in 1998, significant progresses have been made on CNT FETs based electronics in the past 20 years, especially for next generation digital elements for ICs. On one hand, intensive researches have been focusing on FETs based on individual CNTs to study the transport properties, optimize device performance, and explore the performance limit. A classic work is the dopingfree fabrication of CMOS CNT FETs, which maintains the high intrinsic carrier mobility and long mean-free-length (MFL) of CNT since the dopant scattering is excluded. Therefore, highperformance ballistic CMOS FETs are easily achievable via a simpler process than conventional Si CMOS technology. [24][25][26][27] Based on doping free approach, CNT CMOS FETs with a gate length of 10 nm have been successfully demonstrated to perform better than Si CMOS FETs with the same gate length but at a lower supply voltage. [28] Furthermore, ultrasmall CNT FETs with a gate length of 5 nm or footprint of 40 nm have been realized through optimizing device structure and process, which has approached the quantum limit of conventional FETs by using approximately only one electron per switching operation on one CNT. [29,30] On the other hand, various scale of ICs have been fabricated on CNT thin films to demonstrate the industrialization possibility, for example, fundamental logic gates with excellent electrical characteristic, [31] high-speed ring oscillators that can work in gigahertz regime, [32,33] and complex and largescale ICs, including decoder, [34] full-adder, [35,36] or even a CNTbased center processing unit (CPU) using p-type CNT FETs or P-MOS. [37] These successful demonstrations of medium or large-scale CNT circuits illustrate the uniformity and stability of CNT materials and transistors, as well as the development potential on ultralarge scale ICs applications. However, access to ideal materials, device structure, and fabrication remain a challenge if we are targeting at the industrialization of highperformance CNT ICs. To minimize confusion, we use the word "CNT thin film FET" to distinguish high performance The device standards necessary for high-performance carbon nanotube (CNT) field-effect transistors (FETs) for integrated circuits (ICs) are discussed by illustrating key device metrics. Recent advances in solution-processed CNT network-materials a...