2004
DOI: 10.1063/1.1710709
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Extension of Coulomb blockade region by quantum confinement in the ultrasmall silicon dot in a single-hole transistor at room temperature

Abstract: First room-temperature (RT) observation of extended Coulomb blockade (CB) region due to quantum confinement in the ultrasmall silicon dot in a single-hole transistor (SHT) is described. We fabricate single-dot SHTs in the form of metal-oxide-semiconductor field-effect transistors with an extremely constricted channel. Both large CB oscillation with the peak-to-valley current ratio (PVCR) of 40.4 and clear negative differential conductance (NDC) with the PVCR of 11.8 (highest ever reported) are observed at RT i… Show more

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Cited by 65 publications
(65 citation statements)
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“…1 However, the reliability of room-temperature ͑RT͒ operation and requirement of complementary metal-oxide-semiconductor-compatible processes have been the main bottlenecks for implementing further practical device applications. Significant earlier work has been aimed at implementing a RT-operating SET, using various schemes, device structures, and fabrication processes, [2][3][4][5][6][7] but reliable processes for the controlled fabrication of ultrasmall size Coulomb islands of less than 5 nm have not been firmly established yet, limiting practical device applications at RT.…”
mentioning
confidence: 99%
“…1 However, the reliability of room-temperature ͑RT͒ operation and requirement of complementary metal-oxide-semiconductor-compatible processes have been the main bottlenecks for implementing further practical device applications. Significant earlier work has been aimed at implementing a RT-operating SET, using various schemes, device structures, and fabrication processes, [2][3][4][5][6][7] but reliable processes for the controlled fabrication of ultrasmall size Coulomb islands of less than 5 nm have not been firmly established yet, limiting practical device applications at RT.…”
mentioning
confidence: 99%
“…at corners where the NW meets source / drain regions, to enhance oxidation and create SiO 2 tunnel barriers. Both single [17] and chains of islands [24], forming a multiple tunnel junction (MTJ), have been used.…”
Section: Silicon Nanowiresmentioning
confidence: 99%
“…Relatively recently, by reducing the Si island size to < 10 nm, such that the single-electron charging energy E c >> k B T = 26 meV at 300 K, strong room-temperature single-electron current oscillations with very large peak -valley ratios have been reported [17,24,29,32].…”
Section: Silicon Nanowiresmentioning
confidence: 99%
See 1 more Smart Citation
“…[1][2][3][4][5][6][7] Considerable efforts toward room-temperature operation have recently been demonstrated by ultrasmall dot-based SET structures. [8][9][10][11][12][13] Particularly, most recent works [11][12][13] reported the implementation of CMOS-compatible sub_5nm Si SET whose charge stability features three and a half clear multiple Coulomb diamonds at 300K, showing high peak-to-valley current ratio (PVCR). However, despite such aggressive downscaling silicon nanotechnology, the conventional state-of-the-art dynamic random-access-memory (DRAM) has been keeping the binary scheme, and this makes further increasing storage functionality difficult in the future terabit device applications.…”
mentioning
confidence: 99%