Fabricating optical waveguide based on porous silicon structures

Shokrollahi, Abbas; Zare, Maryam

doi:10.1016/j.ijleo.2012.01.046

Cited by 12 publications

(4 citation statements)

References 21 publications

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“…[14,15] As an optical material, m-Si is attractive compared to polycrystalline, amorphous or nanoporous Si due to its low propagation losses and its ability to be engineered into geometries that create well defined evanescent waves for applications in optical sensing. [16,17]…”

Section: Introductionmentioning

confidence: 99%

Flexible Transient Optical Waveguides and Surface‐Wave Biosensors Constructed from Monocrystalline Silicon

Bai

Yang

et al. 2018

Advanced Materials

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Optical technologies offer important capabilities in both biological research and clinical care. Recent interest is in implantable devices that provide intimate optical coupling to biological tissues for a finite time period and then undergo full bioresorption into benign products, thereby serving as temporary implants for diagnosis and/or therapy. The results presented here establish a silicon-based, bioresorbable photonic platform that relies on thin filaments of monocrystalline silicon encapsulated by polymers as flexible, transient optical waveguides for accurate light delivery and sensing at targeted sites in biological systems. Comprehensive studies of the mechanical and optical properties associated with bending and unfurling the waveguides from wafer-scale sources of materials establish general guidelines in fabrication and design. Monitoring biochemical species such as glucose and tracking physiological parameters such as oxygen saturation using near-infrared spectroscopic methods demonstrate modes of utility in biomedicine. These concepts provide versatile capabilities in biomedical diagnosis, therapy, deep-tissue imaging, and surgery, and suggest a broad range of opportunities for silicon photonics in bioresorbable technologies.

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Section: Introductionmentioning

confidence: 99%

Flexible Transient Optical Waveguides and Surface‐Wave Biosensors Constructed from Monocrystalline Silicon

Bai

Yang

et al. 2018

Advanced Materials

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“…In this case, the porosity and the thickness of the film depend strongly on the fabrication parameters like current density, reaction time and electrolyte composition [5]. In this experiment, first, the calibration plots which show the effect of etching current density on porosity and thickness of the PS layer are provided in Figs.…”

Section: Resultsmentioning

confidence: 99%

“…This enables the realization of multilayered PSi structures with different refractive index, which are a subject of intensive and recent research, especially in the field of sensors using photonic devices: Fabry-Perrot filters, Bragg mirrors (BM), resonant microcavities and waveguides [2][3][4][5]. In particular, the interference fringe pattern produced by these structures is useful in PSi-based transducers for biological and chemical species detection [6].…”

Section: Introductionmentioning

confidence: 99%

Bragg mirrors porous silicon back reflector for the light trapping in hydrogenated amorphous silicon

Seba

Hadjersi

Zebbar

2015

Applied Surface Science

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“…It has long been known that by varying the anodization parameters, such as concentration of hydrofluoric acid (HF), current density, time, doping type of substrate, etc., various PS samples with different structural, morphological and optical properties can be obtained. These controllable properties enable PS to be used in different areas, such as optoelectronics, 4 microelectronics, The first report of room temperature visible PL from PS fabricated by electrochemical anodization has attracted much attention from a fundamental physics viewpoint and because of the potential application to optical devices. 1 The mechanism of visible PL from PS is not understood well.…”

Section: Introductionmentioning

confidence: 99%

Influence of applied current density on the nanostructural and light emitting properties of n-type porous silicon

Çetinel

Artunç

Şahin

et al. 2015

Int. J. Mod. Phys. B

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Effects of current density on nanostructure and light emitting properties of porous silicon (PS) samples were investigated by field emission scanning electron microscope (FE-SEM), gravimetric method, Raman and photoluminescence (PL) spectroscopy. FE-SEM images have shown that below 60 mA/cm 2 , macropore and mesopore arrays, exhibiting rough morphology, are formed together, whose pore diameter, pore depth and porosity are about 265-760 nm, 58-63 µm and 44-61%, respectively. However, PS samples prepared above 60 mA/cm 2 display smooth and straight macropore arrays, with pore diameter ranging from 900-1250 nm, porosity of 61-80% and pore depth between 63-69 µm. Raman analyses have shown that when the current density is increased from 10 mA/cm 2 to 100 mA/cm 2 , Raman peaks of PS samples shift to lower wavenumbers by comparison to crystalline silicon (c-Si). The highest Raman peak shift is found to be 3.2 cm −1 for PS sample, prepared at 90 mA/cm 2 , which has the smallest nanocrystallite size, about 5.2 nm. This sample also shows a pronounced PL, with the highest blue shifting, of about 12 nm. Nanocrystalline silicon, with the smallest nanocrystallite size, confirmed by our Raman analyses using microcrystal model (MCM), should be responsible for both the highest Raman peak shift and PL blue shift due to quantum confinement effect (QCE).

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Fabricating optical waveguide based on porous silicon structures

Cited by 12 publications

References 21 publications

Flexible Transient Optical Waveguides and Surface‐Wave Biosensors Constructed from Monocrystalline Silicon

Flexible Transient Optical Waveguides and Surface‐Wave Biosensors Constructed from Monocrystalline Silicon

Bragg mirrors porous silicon back reflector for the light trapping in hydrogenated amorphous silicon

Influence of applied current density on the nanostructural and light emitting properties of n-type porous silicon

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