Fabrication and characterization of cantilevers with integrated sharp tips and piezoelectric elements for actuation and detection for parallel AFM applications

Indermühle, P.-F.; Schürmann, G.; Racine, G.-A.; Rooij, N. F. de

doi:10.1016/s0924-4247(96)01440-9

Cited by 39 publications

(23 citation statements)

References 6 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Tapping mode is an important AFM tool for imaging biological and liquid media samples. In the liquid environment the cantilever is subject to large capillary forces effectively reducing its scan rate and performance [1]. In order to overcome these issues it is desirable to use the tapping mode for imaging liquid media samples.…”

Section: Introductionmentioning

confidence: 99%

“…This gives rise to spurious resonance peaks in the liquid media and makes it difficult in the selection of resonance peak for actuation. Therefore, a selfexcited AFM probe with an integrated piezoelectric thin film actuator eliminates the need for external oscillator (such as piezotube and piezostack) and enhances accurate tuning of resonance frequency [1]. A feedback controller tracks the probing force between the tip and the sample in order to maintain small contact forces for imaging soft biological specimens [6].…”

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

AFM cantilever with integrated piezoelectric thin film for micro-actuation

et al. 2012

View full text Add to dashboard Cite

This work presents micro-actuation of atomic force microscopy (AFM) cantilevers using piezoelectric Zinc Oxide (ZnO) thin film. In tapping mode AFM, the cantilever is driven near its resonant frequency by an external oscillator such as piezotube or stack of piezoelectric material. Use of integrated piezoelectric thin film for AFM cantilever eliminates the problems like inaccurate tuning and unwanted vibration modes. In this work, silicon AFM cantilevers were sputter deposited with ZnO piezoelectric film along with top and bottom metallic electrodes. The self-excitation of the ZnO coated AFM cantilever was studied using Laser Doppler Vibrometer (LDV). At its resonant frequency (227.11 kHz), the cantilever displacement varies linearly with applied excitation voltage. We observed an increase in the actuation response (131nm/V) due to improved quality of ZnO films deposited at 200 °C.

show abstract

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

AFM cantilever with integrated piezoelectric thin film for micro-actuation

et al. 2012

View full text Add to dashboard Cite

show abstract

“…In contrast to multi-probe optical detection, which relies on elements external to the probe for sensing, a variety of other sensors exist that can be integrated on the probe during the fabrication process. Piezoresistive [27] and piezoelectric [28] elements can be deposited on the probe as strain sensors to detect the deflection of the micro-structure. However, deposition of such materials results in high stiffness and generates unwanted stress in the probe structure.…”

Section: Introductionmentioning

confidence: 99%

Scanning probe microscopy based on magnetoresistive sensing

Sahoo

Sebastian²,

Häberle³

et al. 2011

Nanotechnology

View full text Add to dashboard Cite

Integrated sensors are essential for scanning probe microscopy (SPM) based systems that employ arrays of microcantilevers for high throughput. Common integrated sensors, such as piezoresistive, piezoelectric, capacitive and thermoelectric sensors, suffer from low bandwidth and/or low resolution. In this paper, a novel magnetoresistive-sensor-based scanning probe microscopy (MR-SPM) technique is presented. The principle of MR-SPM is first demonstrated using experiments with magnetic cantilevers and commercial MR sensors. A new cantilever design tailored to MR-SPM is then presented and micromagnetic simulations are employed to evaluate the achievable resolution. A remarkable resolution of 0.84 Å over a bandwidth of 1 MHz is estimated, which would significantly outperform state-of-the-art optical deflection sensors. Due to its combination of high resolution at high bandwidth, and its amenability to integration in probe arrays, MR-SPM holds great promise for low-cost, high-throughput SPM.

show abstract

“…Indeed, the use of array architectures of micro probes not only significantly increases the throughput of the device, it enhances its functionality as well, allowing for more complex, multipurpose instruments. Examples of such devices can be found in data storage and retrieval applications [1], biosensors [2], and multiprobe scanning devices [3] to cite but a few.…”

Section: Introductionmentioning

confidence: 99%

Characterization of electrostatically coupled microcantilevers

Napoli

Zhang

Turner

et al. 2005

J. Microelectromech. Syst.

View full text Add to dashboard Cite

Abstract-The use of tightly packed arrays of probes can achieve the much desirable goal of increasing the throughput of scanning probe devices. However the proximity of the probes induces coupling in their dynamics, which increases the complexity of the overall device. In this paper we analyze and model the behavior of a pair of electrostatically and mechanically coupled microcantilevers. For the common case of periodic driving voltage, we show that the underlying linearized dynamics are governed by a pair of coupled Mathieu equations. We provide experimental evidence that confirms the validity of the mathematical model proposed, which is verified by finite element simulations as well. The coefficients of electrostatic and mechanical coupling are estimated respectively by frequency identification methods and noise analysis. Finally, we discuss parametric resonance for coupled oscillators and include a mapping of the first order coupled parametric resonance region.[1253]

show abstract

Fabrication and characterization of cantilevers with integrated sharp tips and piezoelectric elements for actuation and detection for parallel AFM applications

Cited by 39 publications

References 6 publications

AFM cantilever with integrated piezoelectric thin film for micro-actuation

AFM cantilever with integrated piezoelectric thin film for micro-actuation

Scanning probe microscopy based on magnetoresistive sensing

Characterization of electrostatically coupled microcantilevers

Contact Info

Product

Resources

About