Scanning probe microscopy based on magnetoresistive sensing

Sahoo, Deepak Ranjan; Sebastian, Abu; Häberle, W.; Pozidis, Haralampos; Eleftheriou, Evangelos

doi:10.1088/0957-4484/22/14/145501

Cited by 32 publications

(22 citation statements)

References 41 publications

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“…Technologies such as piezoresistive sensors [91] have also shown promise in high-speed applications since a carrier frequency is not required. Magnetoresistive sensors are also suitable for highfrequency applications if the changes in field strength can be kept small enough to mitigate hysteresis [18,19].…”

Section: Outlook and Future Requirementsmentioning

confidence: 99%

Position Sensors for Nanopositioning

Fleming

Leang

2016

Nanopositioning Technologies

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Position sensors with nanometer resolution are a key component of many precision imaging and fabrication machines. Since the sensor characteristics can define the linearity, resolution, and speed of the machine, the sensor performance is a foremost consideration. The first goal of this article is to define concise performance metrics and to provide exact and approximate expressions for error sources including nonlinearity, drift, and noise. The second goal is to review current position sensor technologies and to compare their performance. The sensors considered include: resistive, piezoelectric, and piezoresistive strain sensors; capacitive sensors; electrothermal sensors; eddy-current sensors; linear variable displacement transformers; interferometers; and linear encoders.

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Section: Outlook and Future Requirementsmentioning

confidence: 99%

Position Sensors for Nanopositioning

Fleming

Leang

2016

Nanopositioning Technologies

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“…For hybrid AMR cantilever a lateral spatial resolution of a few mm and a field sensitivity of 0.17 mT were reported [85]. Recently, Sahoo et al [87] used the MR sensor to detect the cantilever displacement, instead of the typical optical or piezoelectric detection modes. In this case, one aims to translate the cantilever displacement into a change in the magnetic field sensed by a MR sensor in close proximity.…”

Section: 3mentioning

confidence: 99%

“…Figure 5 (bottom) shows MR scanning probe microscopy contact-mode imaging of a surface using one of the architecture suggested in Ref. [87]. The authors envisaged a resolution of 84 pm achieved over a bandwidth of 1 MHz, overcoming the 200 pm (over 1 MHz) achievable using optical means in state-of-the-art AFMs.…”

Section: 3mentioning

confidence: 99%

Magnetoresistive Sensors for Surface Scanning

Leitao¹,

Borme

Orozco

et al. 2013

Giant Magnetoresistance (GMR) Sensors

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Abstract. This chapter provides an overview on several techniques used for surface imaging, including SQUIDs, Hall-effect sensors, Giant magnetoimpedance sensors, and magnetoresistive (MR) sensors. Among all magnetic field sensors, only SQUIDs and MR devices have the potential to localize buried and non-visual field sources (such as defects in integrated circuits or magnetic field sources in biological environments. In particular, we describe how MR sensors have been used with advantage for integrated circuit (IC) mapping, with resolution below 500 nm and sensitivity to detect currents as low as 50 nA and have been used for many applications requiring low magnetic field detection. Challenges and experimental considerations on integration of MR sensors on a commercial analysis tool are provided here. Examples obtained with real devices demonstrate how Scanning Magnetic Microscopy has become an established failure analysis technique for visualizing current paths in microelectronic devices.

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“…Other possible measurement techniques include inferometric [51], [52], piezoresisitive [53], [54], capacitive [55], thermal [54], [56], magnetoresistive [57], and piezoelectric [44], [58], [59] sensors.…”

Section: Cantilever Deflection Measurementmentioning

confidence: 99%

Control Techniques for Increasing the Scan Speed and Minimizing Image Artifacts in Tapping-Mode Atomic Force Microscopy: Toward Video-Rate Nanoscale Imaging

Fairbairn

Moheimani

2013

IEEE Control Syst.

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T he atomic force microscope (AFM) [1] is a mechanical microscope capable of producing three-dimensional images of a wide variety of sample surfaces with nanometer precision in air, vacuum, or liquid environments. This article provides an overview of the AFM and its three main modes of operation, with a focus on the tapping mode of operation. The challenges associated with obtaining high-speed images with a tapping-mode AFM while minimizing image artifacts are outlined and control techniques that have been developed to overcome these challenges are reviewed.

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Scanning probe microscopy based on magnetoresistive sensing

Cited by 32 publications

References 41 publications

Position Sensors for Nanopositioning

Position Sensors for Nanopositioning

Magnetoresistive Sensors for Surface Scanning

Control Techniques for Increasing the Scan Speed and Minimizing Image Artifacts in Tapping-Mode Atomic Force Microscopy: Toward Video-Rate Nanoscale Imaging

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