Fabrication and electrical properties of laser-shaped thick-film and LTCC microresistors

Nowak, Damian; Miś, Edward; Dziedzic, Andrzej; Kita, Jarosław

doi:10.1016/j.microrel.2009.02.019

Cited by 20 publications

(13 citation statements)

References 8 publications

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“…In the presented investigation, the precise screen-printing technique was chosen. Although it does not allow to fabricate such precise patterns as photosensitive paste technique (Wyżkiewicz et al, 2006) or laser shaping technique (Nowak et al, 2009), it allows for quick and repeatable fabrication of many thermocouples, with a resolution of 100 -200 m on the green tape substrate.…”

Section: Thermoelectric Materials For the Energy Harvestermentioning

confidence: 99%

Thermoelectric energy harvester fabricated in thick-film/LTCC technology

Markowski

2014

Microelectronics International

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Purpose -The purpose of this work was fabrication of a small energy harvester. Design/methodology/approach -The multilayer thermoelectric power generator based on thick-film and low temperature co-fired ceramic (LTCC) technology was fabricated. Precise paths printing method was used to fabricate Ag/Ni and Ag/PdAg thermocouples on a number of unfired LTCC tapes. The tapes were put together to form a multilayer stack. The via holes were used to make the electrical connections between adjacent layers. Finally, the multilayer stack was fired in the appropriate thermal profile. Findings -It consists of 450 thermocouples and generates output voltage of about 0.45 V and output electrical power of about 0.13 mW when a temperature difference along the structure is 135°C. In the paper, individual stages of energy harvester fabrication process as well as its output parameters are presented. Originality/value -Miniaturized thermoelectric energy harvester based on thick-film and LTCC technology was fabricated. As materials, metal-based pastes were used. This is the first paper where multilayer thermoelectric harvester, fabricated with the aid of LTCC technology, was described.

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Section: Thermoelectric Materials For the Energy Harvestermentioning

confidence: 99%

Thermoelectric energy harvester fabricated in thick-film/LTCC technology

Markowski

2014

Microelectronics International

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“…On each substrate a set of three resistors of 200 m width and lengths of 30, 60, 90, 120, 150, and 300 m has been prepared. Successive stages of the resistor preparation process include (i) the firing of the substrate, (ii) screen-printing of the conductive layer on the fired substrate, (iii) laser scribing of the dried conductive layer to define the length of the resistor, (iv) firing of the conductive layer, (v) screen-printing of the resistive paste into the incised place, and finally (vi) firing of the resistive layer using a suitable temperature profile with 875 C peak firing temperature [23]. The thickness of the final resistive layers has been measured with the Talysurf CCI (from Taylor Hobson Precision) optical profilometer, giving d ≈ 15 m for the resistors of 30, 60, and 90 m length, and d ≈ 10 m for the others.…”

Section: Sample Preparationmentioning

confidence: 99%

Noise Spectroscopy of Resistive Components at Elevated Temperature

Stadler

Zawiślak

Dziedzic

et al. 2014

Metrology and Measurement Systems

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Studies of electrical properties, including noise properties, of thick-film resistors prepared from various resistive and conductive materials on LTCC substrates have been described. Experiments have been carried out in the temperature range from 300 K up to 650 K using two methods, i.e. measuring (i) spectra of voltage fluctuations observed on the studied samples and (ii) the current noise index by a standard meter, both at constant temperature and during a temperature sweep with a slow rate. The 1/f noise component caused by resistance fluctuations occurred to be dominant in the entire range of temperature. The dependence of the noise intensity on temperature revealed that a temperature change from 300 K to 650 K causes a rise in magnitude of the noise intensity approximately one order of magnitude. Using the experimental data, the parameters describing noise properties of the used materials have been calculated and compared to the properties of other previously studied thick-film materials.

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“…The test structures used for investigation of electromigration were made using a combination of standard screen-printing with laser shaping [7,8]. The electrodes were made on alumina or LTCC (DP951 tape, DuPont) substrates.…”

Section: Test Structuresmentioning

confidence: 99%

Analysis of electromigration phenomenon in thick-film and LTCC structures at elevated temperature

Nowak

Stafiniak

Dziedzic

2014

Materials Science-Poland

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Studies on electromigration phenomenon in thick-film structures on alumina and LTCC substrates are presented in this paper. The effects of storage of Au and Ag electrode patterns in temperature range up to 300°C under voltage bias were examined. The leakage characteristics of electrodes with 100 µm spacing at 50 V dc bias as a function of time and temperature are presented and analyzed. Scanning electron microscope (SEM) equipped with the energy-dispersive X-ray spectroscopy (EDX) detector was applied for determination of metal ions transport. Test structures with Au-based conductive material are much more resistant to electromigration than Ag-based layers.

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Fabrication and electrical properties of laser-shaped thick-film and LTCC microresistors

Cited by 20 publications

References 8 publications

Thermoelectric energy harvester fabricated in thick-film/LTCC technology

Thermoelectric energy harvester fabricated in thick-film/LTCC technology

Noise Spectroscopy of Resistive Components at Elevated Temperature

Analysis of electromigration phenomenon in thick-film and LTCC structures at elevated temperature

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