Fabrication and Electrochemical Characterization of Micro- and Nanoelectrode Arrays for Sensor Applications

Said, Nur Azura Mohd; Twomey, Karen; Ogurtsov, Vladimir I.; Arrigan, Damien W. M.; Herzog, Grégoire

doi:10.1088/1742-6596/307/1/012052

Cited by 12 publications

(10 citation statements)

References 16 publications

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“…In addition to photolithographic methods, other approaches have been reported for patterning arrays 43 to give electrode elements arranged in an ordered manner with well-dened inter-electrode spacing, including controlled polymer deposition, orientation and selective dissolution, 44 as well as carbon nanotube (CNT) 45,46 and boron-doped diamond 47 nanowire assemblage. However, the challenge with polymer deposition is to control the electrode size and spacing, while CNT assemblies still require standard lithographic patterning (e.g.…”

Section: Introductionmentioning

confidence: 99%

A systematic study of the influence of nanoelectrode dimensions on electrode performance and the implications for electroanalysis and sensing

et al. 2013

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Micron resolution photolithography has been employed to make microsquare nanoband edge electrode (MNEE) arrays with reproducible and systematic control of the crucial dimensional parameters, including array element size and spacing and nanoelectrode thickness. The response of these arrays, which can be reproducibly fabricated on a commercial scale, is first established. The resulting characteristics (including high signal and signal-to-noise, low limit of detection, insensitivity to external convection and fast, steady-state, reproducible and quantitative response) make such nanoband electrode arrays of real interest as enhanced electroanalytical devices. In particular, the nanoelectrode response is presented and analysed as a function of nanometre scale electrode dimension, to assess the impact and relative contributions of previously postulated nanodimensional effects on the resulting response. This work suggests a significant contribution of migration at the band edges to mass transfer, which affects the resulting electroanalytical response even at ionic strengths as large as 0.7 mol dm(-3) and for electrodes as wide as 50 nm. For 5 nm nanobands, additional nanoeffects, which are thought to arise from the fact that the size of the redox species is comparable to the band width, are also observed to attenuate the observed current. The fundamental insight this gives into electrode performance is discussed along with the consequent impact on using such electrodes of nanometre dimension.

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Section: Introductionmentioning

confidence: 99%

A systematic study of the influence of nanoelectrode dimensions on electrode performance and the implications for electroanalysis and sensing

et al. 2013

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“…Said et al. studied the recessed micro‐band electrode arrays and came to the same conclusion. Szakaly et al.…”

Section: Resultsmentioning

confidence: 99%

“…In order to increase the signal to noise ratio, improve the sensitivity and lower further detection limits, many individual micro‐electrodes could be arranged into array . Both inlaid and recessed disk and band electrodes are used . The recessed micro‐electrode has the advantage that the convection of the bulk solution influences only slightly the mass transport in the hole and therefore linear concentration gradient of electroactive species is more easily achieved in the micro‐hole and the overlapping of the diffusion layers of the micro‐electrodes in the array is less probable .…”

Section: Introductionmentioning

confidence: 99%

Electrochemical Characterization of the Microfabricated Electrochemical Sensor‐Array System

et al. 2016

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Microfabrication technology has been used to prepare a microchip sensor‐array with six sets of platinum electrodes. Chromium/platinum (10 nm/100 nm thick) were sputtered on a borosilicate wafer and patterned by wet etching method. The electrodes were designed with working electrode area of 700×400 μm in the middle and a 200 μm wide and 2600 μm long counter electrode surrounding it from three sides in a U‐shape. The connection pads (1000×1500 μm) were located at the edge of a sensor‐array chip. Silicon wafer was etched through to form holes with slanting side walls for immobilization cavities. The silicon and the borosilicate wafers were adhesion bonded with SU‐8 epoxy resin. The cyclic voltammetry and electrochemical impedance experiments were carried out in a three‐electrode electrochemical system to characterize the fabricated sensor‐array chip. The results show that the current density depends on the electrode potential sweep rate ν. Also, current density depends on the concentration of potassium hexacyanoferrate(III). At slow potential sweep rates (ν≤0.01 V s−1) the steady‐state signal is achieved and the electrodes behave as micro‐electrodes. Such an array is a promising candidate for fast and simple biochemical oxygen demand (BOD) measurements.

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“…Silicon nitride [16,44,48,[60][61][62][63][64][65][66][67][68][69][70][71][72][73][74][75] epoxy [5,9,46,54,55,58,76,77];…”

Section: Electrode Materials Insulators Sealantsmentioning

confidence: 99%

Band Electrodes in Sensing Applications: Response Characteristics and Band Fabrication Methods

Batchelor‐McAuley

Chen

et al. 2019

ACS Sens.

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This review surveys the fabrication methods reported for both single microband electrodes and microband electrode arrays and their uses in sensing applications. A theoretical section on band electrodes provides background information on the structure of band electrodes, their diffusional profiles and the types of voltammetric behaviour observed. A short section summarises the currently available commercial microband electrodes. A section describing recent (10 years) sensing applications using band electrode is also presented.

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Fabrication and Electrochemical Characterization of Micro- and Nanoelectrode Arrays for Sensor Applications

Cited by 12 publications

References 16 publications

A systematic study of the influence of nanoelectrode dimensions on electrode performance and the implications for electroanalysis and sensing

A systematic study of the influence of nanoelectrode dimensions on electrode performance and the implications for electroanalysis and sensing

Electrochemical Characterization of the Microfabricated Electrochemical Sensor‐Array System

Band Electrodes in Sensing Applications: Response Characteristics and Band Fabrication Methods

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