1993
DOI: 10.1063/1.110436
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Fabrication and properties of epitaxial ferroelectric heterostructures with (SrRuO3) isotropic metallic oxide electrodes

Abstract: Epitaxial ferroelectric SrRuO3/Pb(Zr0.52Ti0.48)O3/SrRuO3 heterostructures have been fabricated employing isotropic metallic oxide electrodes on (100) SrTiO3 and (100) Si with an yttria stabilized zirconia buffer layer. The structures have been grown in situ by 90° off-axis sputtering, which allows the growth of uniform stoichiometric films over large areas with excellent step coverage. X-ray diffraction, Rutherford backscattering spectroscopy, and cross-sectional transmission electron microscopy reveal high cr… Show more

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Cited by 424 publications
(126 citation statements)
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“…16 Further the use of oxide electrodes is very beneficial for the long-term stability of ferroelectric oxides, as compared to metal electrodes. 17 For the ferroelectric the PMN-PT(67/33) composition was selected because of its giant piezoelectricity in thin film form on STO-buffered silicon as was shown by S. H. Baek et al 4 All films were deposited on a heated substrate with PLD using a KrF Excimer laser operating at 248nm, using commercial targets. The deposition conditions are given in table I.…”
Section: Methodsmentioning
confidence: 99%
“…16 Further the use of oxide electrodes is very beneficial for the long-term stability of ferroelectric oxides, as compared to metal electrodes. 17 For the ferroelectric the PMN-PT(67/33) composition was selected because of its giant piezoelectricity in thin film form on STO-buffered silicon as was shown by S. H. Baek et al 4 All films were deposited on a heated substrate with PLD using a KrF Excimer laser operating at 248nm, using commercial targets. The deposition conditions are given in table I.…”
Section: Methodsmentioning
confidence: 99%
“…Several groups reported on the growth and crystallographic characterization of ferroelectric thin films in combination with a variety of oxidic electrode materials. [5][6][7] Ramesh et al 8 9 Important questions remain as to the nature of the electrode-ferroelectric interface. For example, it is unclear if the near-electrode material is ferroelectric and if charge injection is of importance.…”
Section: Introductionmentioning
confidence: 99%
“…SrRuO 3 has been subject to many studies because of its unique structural, magnetic, and electronic properties, and chemical stability. 1 The strong magnetocrystalline anisotropy in single-domain thin films 2,3 as well as crystals makes SrRuO 3 especially suitable for use in magnetic tunnel junctions, provided that single-domain heterostructures are achievable. 4,5 Furthermore, ferromagnetic SrRuO 3 has been used as a model system to study the initial growth, with special attention to surface termination and growth mode.…”
mentioning
confidence: 99%