Fabrication and Structural Evaluation of Beaded Inorganic Nanostructures Using Soft‐Electron‐Beam Lithography

Nanopatterned polycrystalline ZnO for room temperature gas sensing

“…2(b)-(d). The ZnO thin film has larger grain sizes than the nanolines, because of the spatial and dimensional constraint considerations [15]. The crystallization of ZnO sol is dependent on the nucleation and grain growth rates.…”

“…mixture of zinc acetate dehydrate (Zn(CH 3 COO) 2 ·H 2 O), 2-methoxy ethanol and ethanol amine at 60 • C for 2 h. The sol was spin-coated on silicon oxide substrate to form ZnO thin film. ZnO nanolines were fabricated by soft-eBL [14][15][16], and the fabrication process is schematically outlined in Fig. 1.…”

Universal Block Copolymer Lithography for Metals, Semiconductors, Ceramics, and Polymers

“…However, their serial writing process or direct mechanical contact with a target material frequently limits large-scale production of densely packed nanostructures. [12,13] Alternatively, nanoporous templates, such as track-etched membrane or anodic aluminum oxide (AAO), have been used in conjunction with a deposition or etching process to produce various nanostructured materials. [14] Although track-etched membranes and AAO are commercially available, they only provide porous template morphology.…”

Micrometer and nanometer-scale parallel patterning of ceramic and organic–inorganic hybrid materials

“…112 After creating a 3D patterned polymer-based resist film on a hard substrate using soft e-beam lithography, all formed voids in the resist film were filled with a spin-on sol-gel precursor, followed by removal of the resist and consolidation of the sol-gel. In this manner functional patterns of ZnO, 113 BiFeO 3 ,114,115 BaTiO 3 ,116,117 and CoFe 2 O 4 117 with resolutions down to 40 nm were made. The method illustrates how small the features are that can be realised with sol-gel chemistry.…”