Fabrication of 0.15 um SOI p-MOSFETs using synchrotron radiation x-ray lithography

Choi, S. S.; Jeon, Yoo-Chan; Lyu, Jeong-Ho; Yoo, Hyun Jung; Fabrizio, E. Di; Grella, L.; Gentili, M.

doi:10.1117/12.2298889

17th Congress of the International Commission for Optics: Optics for Science and New Technology 1996

DOI: 10.1117/12.2298889

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Fabrication of 0.15 um SOI p-MOSFETs using synchrotron radiation x-ray lithography

S. S. Choi¹,

Yoo-Chan Jeon²,

Jeong-Ho Lyu³

et al.

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Fabrication of 0.15 um SOI p-MOSFETs using synchrotron radiation x-ray lithography

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