Fabrication of Fresnel zone plates with high aspect ratio by soft X-ray lithography

Liu, Longhua; Liu, Gang; Xiong, Ying; Chen, Jie; Kang, C.L.; Huang, Xianghua; Tian, Yangchao

doi:10.1007/s00542-007-0542-7

Cited by 10 publications

(6 citation statements)

References 13 publications

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“…(5) After ion etching for 2 min, circular gold patterns of zone plates with high aspect ratio has been fabricated on the freestanding Si 3 N 4 film. The more detailed fabrication processes can be found in (Liu et al 2008). Using Raith e-LiNE e-beam lithography system, the zone plates mask with outermost zone width of 100 nm was fabricated.…”

Section: Zone Plates' Fabrication Processesmentioning

confidence: 99%

Fabrication of X-ray imaging zone plates by e-beam and X-ray lithography

Liu

Xiong

et al. 2009

Microsyst Technol

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X-ray imaging and microscopy techniques have been developed in worldwide due to their capabilities of large penetration power and high spatial resolution. Fresnel zone plates is considered to be one of the most convenient optic devices for X-ray imaging and microscopy system. The zone plates with aspect ratio of 7 and 13 have been fabricated by e-beam lithography combined with X-ray lithography in this paper. Firstly, the X-ray lithography mask of zone plates with outermost zone width of 100 nm was fabricated by e-beam lithography and gold electroplating techniques. Secondly, the zone plates with gold profile thickness of 700 and 1,300 nm were replicated by X-ray lithography and gold electroplating techniques. X-ray imaging and microscopy techniques were introduced to characterize the high-aspect-ratio zone plates' inner structures. At the X-ray energy of 7.5 keV, the first-order focusing efficiency of zone plates with gold profile thickness of 700 nm is about 8.63%.

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Section: Zone Plates' Fabrication Processesmentioning

confidence: 99%

Fabrication of X-ray imaging zone plates by e-beam and X-ray lithography

Liu

Xiong

et al. 2009

Microsyst Technol

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“…Moreover, Micro-FAST may be a better way to realize the densification process than SPS does because of the higher pressure applied, e.g., 100 MPa. For most materials, the low sintering temperature and short sintering time can effectively restrain the grain growth and allow the preparation of materials with highdensity and fine crystalline structure [9], [15], [16]. Compared to conventional sintering methods, Micro-FAST is a promising and energy-efficient technique.…”

Section: Process Configurationmentioning

confidence: 99%

“…A LIGA process is based on synchrotron X-ray radiation lithography and galvanoforming [14]. X-ray lithography is a conventional microfabrication technique which is suitable mostly for fabricating polymeric and silicon-based materials [15]. A significant drawback to LIGA is sophisticated equipment and high cost as well as low efficiency.…”

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confidence: 99%

Forming Microgears by Micro-FAST Technology

Yang

Qin

et al. 2013

J. Microelectromech. Syst.

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The use of microcomponents as well as intensive competition on manufacturing cost led to the requirement for cost-effective production of those components without much compromise on their final quality. To address this issue, a novel microforming technology, named as micro-field-activated sintering technology (Micro-FAST), was introduced for the fabrication of microcomponents, in which loose powders were pressed and sintered to form microgears via electroheating loop sintering and microforming. The whole process was realized in a Gleeble-1500D thermal simulation machine. A relative density of 98.7% was achieved after sintering microgears with eight teeth on it and 1.6 mm pitch diameter at 600 • C, heating rate of 50 • C/s, pressure of 100 MPa, and electroheating loop of five times. Being different from a conventional FAST process, the Micro-FAST process is of different characteristics largely due to the size effect. Effects of the external electric field, thermal field, and pressure field on the Micro-FAST densification process were analyzed. It was revealed that the deformation of the particles and fusion at the contact interfaces between particles are two important parameters to the densification of the green body and, hence, to the quality of the final component.[ 2012-0294]Index Terms-Copper, field-activated sintering technique (FAST), micro-field-activated sintering technology (Micro-FAST), microgears, powders.

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“…Micro system technology (MST) is one of the leading techniques for producing micro components on the nanometer to millimeter scale [6]. X-ray lithography is a conventional micro fabrication technique suitable for fabricating polymeric and silicon-based materials [7,8]. Other fabrication techniques used include micro electrodischarge machining (EDM) and laser micro machining which can produce a wide range of micro components from a variety of materials [9,10].…”

Section: Introductionmentioning

confidence: 99%