Fabrication of Glass-based Microfluidic Devices with Photoresist as Mask

Bahadorimehr, Alireza; Majlis, Burhanuddin Yeop

doi:10.5755/j01.eee.116.10.878

Cited by 10 publications

(4 citation statements)

References 14 publications

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“…Glass in most cases is the material of choice for the chemists and biologists, but the isotropic nature of its wet etching makes it difficult to create deep channels in glass. Also the fragility of this material is another issue [6]. Fig.…”

Section: Materials Selectionmentioning

confidence: 99%

Issues and challenges in microfluidic research studies

Alvankarian

Bahadorimehr

Davaji

et al. 2012

2012 10th IEEE International Conference on Semiconductor Electronics (ICSE)

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This article investigates the common problems of fabrication and testing of microfluidic devices. Compatibility of the main substrate properties with the materials and experiments involved is very important for performing a test using a microfluidic device. Methods of solving the problems associated with the fabrication techniques involved are critical in creating a new microfluidic device. Specific preparatory steps need to be considered before microfluidic testing and during experimental works to obtain acceptable conclusion.

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Section: Materials Selectionmentioning

confidence: 99%

Issues and challenges in microfluidic research studies

Alvankarian

Bahadorimehr

Davaji

et al. 2012

2012 10th IEEE International Conference on Semiconductor Electronics (ICSE)

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“…In this research, we fabricated a highly durable glass bifurcation microfluidic chip for blood plasma separation. To realize a glass microfluidic chip, various patterning techniques based on the material removal of glass substrate have been investigated, such as mechanical milling [ 25 ], laser ablation [ 26 ], and etching process [ 27 ]. However, these methods are time-consuming due to the high mechanical, chemical, and thermal resistances of the glass materials.…”

Section: Introductionmentioning

confidence: 99%

Fabrication of All Glass Bifurcation Microfluidic Chip for Blood Plasma Separation

Jang

Haq

et al. 2017

Micromachines

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An all-glass bifurcation microfluidic chip for blood plasma separation was fabricated by a cost-effective glass molding process using an amorphous carbon (AC) mold, which in turn was fabricated by the carbonization of a replicated furan precursor. To compensate for the shrinkage during AC mold fabrication, an enlarged photoresist pattern master was designed, and an AC mold with a dimensional error of 2.9% was achieved; the dimensional error of the master pattern was 1.6%. In the glass molding process, a glass microchannel plate with negligible shape errors (~1.5%) compared to AC mold was replicated. Finally, an all-glass bifurcation microfluidic chip was realized by micro drilling and thermal fusion bonding processes. A separation efficiency of 74% was obtained using the fabricated all-glass bifurcation microfluidic chip.

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“…Another important use of droplet generators are in drug and cell encapsulation which is surveyed in many ongoing research and development groups [3][4]. Meanwhile, the easy fabrication methods for different designs with low cost and repeatability are the focus of many research efforts [5][6][7].…”

Section: Introductionmentioning

confidence: 99%

Design and fabrication of a T Mixer Using a Glass based microfluidic method

2015

IJCCIE

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Fabrication of Glass-based Microfluidic Devices with Photoresist as Mask

Cited by 10 publications

References 14 publications

Issues and challenges in microfluidic research studies

Issues and challenges in microfluidic research studies

Fabrication of All Glass Bifurcation Microfluidic Chip for Blood Plasma Separation

Design and fabrication of a T Mixer Using a Glass based microfluidic method

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