Our goal is to design, fabricate, and characterize a pillar-based microfluidic device for size-based separation of human blood cells on an elastomeric substrate with application in the low-cost rapid prototyping of lab-chip devices. The single inlet single outlet device is using parallel U-shape arrays of pillars with cutoff size of 5.5 lm for trapping white blood cells (WBCs) in a pillar chamber with internal dead-volume of less than 1.0 ll. The microstructures are designed to limit the elastomeric deformation against fluid pressures. Numerical analysis showed that at maximum pressure loss of 15 kPa which is lower than the device conformal bonding strength, the pillar elastomeric deformation is less than 5% for flow rates of up to 1.0 ml min

Microfluidic systems are one of the new growing technologies which offer miniaturization of analysis systems. In this paper we present a simple and low cost fabrication of microchannels using in different applications in Micro Total Analysis Systems. This method uses typical microscopic glass slides as a substrate for fabrication of microchannels. Using photo-resist as a mask instead of some deposition methods makes the procedure more convenient and cost effective compare to other techniques. A smooth channel surface with acceptable sharp wall edges makes this procedure suitable for so many applications that vertical walls are not crucial. The comparison between fabrication of channels using wet etching procedures and molding techniques can help to select the more suitable one for any application which needs specific characteristics.

Poly-crystalline silicon carbide (polysic)Micro-electromechanical systems (MEMS) capacitive pressure sensors operating at harsh environments (e.g. high temperature) are proposed because of SiC owing excellent electrical stability, mechanical robustness, and chemical inertness properties. The principle of this paper is, design, simulation. The application of SiC pressure sensors are in a harsh environments such as automotive industries, aerospace, oil/logging equipments, nuclear station, power station. The sensor demonstrated a high temperature sensing capability up to 400 °C, the device achieves a linear characteristic response and consists of a circular clamped-edges poly-sic diaphragm suspended over sealed cavity on a silicon carbide substrate. The sensor is operating in touch mode capacitive pressure sensor, The advantages of a touch mode are the robust structure that make the sensor to withstand harsh environment, near linear output, and large over-range protection, operating in wide range of pressure, higher sensitivity than the near linear operation in normal mode, so in this case some of stray capacitance effects can be neglected.

MEMS offer different fabrication process to fabricate diaphragms in various applications such as microphones, pressure sensors and micro-pumps, etc. The working principle of all these devices is based on the force applies on the one side of the diaphragm and cause the diaphragm deflects. The parameter optimization of diaphragm is the prime challenge due to achieve the best performance of the device. In this paper Displacement, Stress and Vibration analysis which affect on the operation of the diaphragm under pressures is considered. The different shapes of diaphragms (square, rectangular and circular shapes) are also play a significant role in operation in different applications. The purpose of this research is to design a framework to show which kind of diaphragm with what kind of parameters can be chosen for specific MEMS devices.

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