MEMS offer different fabrication process to fabricate diaphragms in various applications such as microphones, pressure sensors and micro-pumps, etc. The working principle of all these devices is based on the force applies on the one side of the diaphragm and cause the diaphragm deflects. The parameter optimization of diaphragm is the prime challenge due to achieve the best performance of the device. In this paper Displacement, Stress and Vibration analysis which affect on the operation of the diaphragm under pressures is considered. The different shapes of diaphragms (square, rectangular and circular shapes) are also play a significant role in operation in different applications. The purpose of this research is to design a framework to show which kind of diaphragm with what kind of parameters can be chosen for specific MEMS devices.

Static power dissipation remains an issue in low power, high speed and high resolution Digital to Analog Converters (DAC). The architecture of such converters often incorporate switched current sources for the higher significant bits of the input signal. In practice, a switched current source is completely turned off when not contributing to generate the analog output and turned on when required. The energy required to reactivate the circuit contribute to static power dissipation. This work proposes a new type of hibernating switched current source that has lower reactivation energy, thus lowers static power dissipation. Simulation shows that the reactivation energy for a 14-bit, 100MHz DAC utilizing this new type of current cell is only 52.5 pJoules. This allows a low power dissipation of only 25mW.

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