Fabrication of Graphene Nanomesh FET Terahertz Detector

Zhai, Yuan; Xiang, Yi; Yuan, Weiqing; Chen, Gang; Liang, Gaofeng; Wen, Zhongquan; Wu, Ying

doi:10.3390/mi12060641

Cited by 9 publications

(3 citation statements)

References 18 publications

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“…The integration of two-dimensional (2D) materials into semiconductor devices is gaining momentum as the technology matures 1 – 3 . One of the remaining challenges is the adhesion, or lack thereof, of the 2D films to adjacent layers due to their van der Waals (vdW) nature 4 , 5 . Adhesion ultimately affects the device reliability, but also 2D layer transfer methods 6 , 7 .…”

Section: Introductionmentioning

confidence: 99%

Button shear testing for adhesion measurements of 2D materials

Schätz,

Nayi,

Weber

et al. 2024

Nat Commun

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Two-dimensional (2D) materials are considered for numerous applications in microelectronics, although several challenges remain when integrating them into functional devices. Weak adhesion is one of them, caused by their chemical inertness. Quantifying the adhesion of 2D materials on three-dimensional surfaces is, therefore, an essential step toward reliable 2D device integration. To this end, button shear testing is proposed and demonstrated as a method for evaluating the adhesion of 2D materials with the examples of graphene, hexagonal boron nitride (hBN), molybdenum disulfide, and tungsten diselenide on silicon dioxide and silicon nitride substrates. We propose a fabrication process flow for polymer buttons on the 2D materials and establish suitable button dimensions and testing shear speeds. We show with our quantitative data that low substrate roughness and oxygen plasma treatments on the substrates before 2D material transfer result in higher shear strengths. Thermal annealing increases the adhesion of hBN on silicon dioxide and correlates with the thermal interface resistance between these materials. This establishes button shear testing as a reliable and repeatable method for quantifying the adhesion of 2D materials.

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Section: Introductionmentioning

confidence: 99%

Button shear testing for adhesion measurements of 2D materials

Schätz,

Nayi,

Weber

et al. 2024

Nat Commun

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“…Since Geim and Novoselov obtained graphene through mechanical exfoliation in 2004 [2], graphene has attracted extensive attention and research due to its outstanding electrical, thermal, optical, and mechanical properties, and it has potential applications in microelectronics, biosensing, medicine, renewable energy, RF systems, and other fields [3][4][5][6][7][8]. Moreover, graphene's ultra-high electron mobility and stable physical properties make it an ideal nanomaterial for replacing silicon in the future [9][10][11]. However, before this, high-quality graphene must be prepared under controlled conditions.…”

Section: Introductionmentioning

confidence: 99%

Design and Simulation of High-Temperature Micro-Hotplate for Synthesis of Graphene Using uCVD Method

Bi,

Hu,

Lin

et al. 2024

Micromachines

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The uCVD (microchemical vapor deposition) graphene growth system is an improved CVD system that is suitable for scientific research and experimental needs, and it is characterized by its rapid, convenient, compact, and low-cost features. The micro-hotplate based on an SOI wafer is the core component of this system. To meet the requirements of the uCVD system for the micro-hotplate, we propose a suspended multi-cantilever heating platform composed of a heating chip, cantilevers, and bracket. In this article, using heat transfer theory and thermoelectric simulation, we demonstrate that the silicon resistivity, current input cross-sectional size, and the convective heat transfer coefficient have a huge impact on the performance of the micro-heating platform. Therefore, in the proposed solution, we adopt a selective doping process to achieve a differentiated configuration of silicon resistivity in the cantilevers and heating chip, ensuring that the heating chip meets the requirements for graphene synthesis while allowing the cantilevers to withstand high currents without damage. Additionally, by adding brackets, the surfaces of the micro-hotplate have the same convective heat transfer environment, reducing the surface temperature difference, and improving the cooling rate. The simulation results indicate that the temperature on the micro-hotplate surface can reach 1050.8 °C, and the maximum temperature difference at different points on the surface is less than 2 °C, which effectively meets the requirements for the CVD growth of graphene using Cu as the catalyst.

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“…Some researchers have improved terahertz detectors in terms of hardware to increase their detection sensitivity and improve detection accuracy. Zhai et al [16] designed and developed a terahertz detector based on graphene nanowebs. The experiments showed that the sensitivity of this detector can reach 2.5 A/W at room temperature by using the energy gap of graphene nanostructures for enhanced plasma excitation, which can achieve the highly sensitive detection of terahertz waves.…”

Section: Introductionmentioning

confidence: 99%

Identification of Unsound Grains in Wheat Using Deep Learning and Terahertz Spectral Imaging Technology

Jiang

Wang

et al. 2022

Agronomy

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This paper offers a prospective solution to the poor quality and less prominent features of the original terahertz spectral images of unsound wheat grains caused due to the imaging system and background noise. In this paper, a CBDNet-V terahertz spectral image enhancement model is proposed. Compared with the traditional algorithms, the peak signal-to-noise ratio (PSNR) and structural similarity (SSIM) of the obtained enhanced images using the proposed model show performance improvement. As validated by the ResNet-50 classification network, the proposed model processes images with an accuracy of 94.8%, and the recognition accuracy is improved by 3.7% and 1.9%, respectively, compared to the images with only denoising and feature extraction. The experimental results indicate that the deep learning-based terahertz spectral image technology for unsound wheat kernels has good prospects in the identification of unsound wheat kernels.

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Fabrication of Graphene Nanomesh FET Terahertz Detector

Cited by 9 publications

References 18 publications

Button shear testing for adhesion measurements of 2D materials

Button shear testing for adhesion measurements of 2D materials

Design and Simulation of High-Temperature Micro-Hotplate for Synthesis of Graphene Using uCVD Method

Identification of Unsound Grains in Wheat Using Deep Learning and Terahertz Spectral Imaging Technology

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