Fabrication of large-area microfluidics structures on glass by imprinting and diode-pumped solid state laser writing techniques

Chen, Qiuping; Chen, Qiuling; Maccioni, Gabriele; Sacco, Adriano; Scaltrito, Luciano; Ferraris, Monica; Ferrero, Sergio

doi:10.1007/s00542-011-1348-1

Cited by 7 publications

(2 citation statements)

References 18 publications

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“…Over recent years, direct laser micromachining using ultrashort laser pulses has evolved to a point where the quality of structures, range of applicable materials, time consumption and cost are on a par with or even better than the conventional methods [34][35][36][37]. What is more, relatively new techniques, such as femtosecond laser induced chemical etching and water-assisted femtosecond laser drilling, offer the fabrication of 3D micro channels within the bulk of a material, bringing a huge advantage over the surface constrained traditional methods [38][39][40][41][42].…”

Section: Introductionmentioning

confidence: 99%

Implementation of an optimized microfluidic mixer in alumina employing femtosecond laser ablation

Juodėnas¹,

Tamulevičius²,

Ulčinas³

et al. 2017

J. Micromech. Microeng.

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Manipulation of liquids at the lowest levels of volume and dimension is at the forefront of materials science, chemistry and medicine, offering important time and resource saving applications. However, manipulation by mixing is troublesome at the microliter and lower scales. One approach to overcome this problem is to use passive mixers, which exploit structural obstacles within microfluidic channels or the geometry of channels themselves to enforce and enhance fluid mixing. Some applications require the manipulation and mixing of aggressive substances, which makes conventional microfluidic materials, along with their fabrication methods, inappropriate. In this work, implementation of an optimized full scale three port microfluidic mixer is presented in a slide of a material that is very hard to process but possesses extreme chemical and physical resistance—alumina. The viability of the selected femtosecond laser fabrication method as an alternative to conventional lithography methods, which are unable to process this material, is demonstrated. For the validation and optimization of the microfluidic mixer, a finite element method (FEM) based numerical modeling of the influence of the mixer geometry on its mixing performance is completed. Experimental investigation of the laminar flow geometry demonstrated very good agreement with the numerical simulation results. Such a laser ablation microfabricated passive mixer structure is intended for use in a capillary force assisted nanoparticle assembly setup (CAPA).

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Section: Introductionmentioning

confidence: 99%

Implementation of an optimized microfluidic mixer in alumina employing femtosecond laser ablation

Juodėnas¹,

Tamulevičius²,

Ulčinas³

et al. 2017

J. Micromech. Microeng.

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show abstract

“…Some examples of glass molding experiments that have employed Ni and Ni alloy molds are summarized in Table S2 in the Supplementary Material of S2 [ 50 , 55 , 56 , 57 , 58 , 60 , 61 , 62 , 63 , 64 , 65 , 66 , 67 , 68 ]. Ni and Ni alloy molds have high mechanical hardness, high corrosion resistance, and lower thermal expansion coefficients.…”

Section: Mold Materials For Precision Glass Moldingmentioning

confidence: 99%

A Comprehensive Review of Micro/Nano Precision Glass Molding Molds and Their Fabrication Methods

et al. 2021

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Micro/nano-precision glass molding (MNPGM) is an efficient approach for manufacturing micro/nanostructured glass components with intricate geometry and a high-quality optical finish. In MNPGM, the mold, which directly imprints the desired pattern on the glass substrate, is a key component. To date, a wide variety of mold inserts have been utilized in MNPGM. The aim of this article is to review the latest advances in molds for MNPGM and their fabrication methods. Surface finishing is specifically addressed because molded glass is usually intended for optical applications in which the surface roughness should be lower than the wavelength of incident light to avoid scattering loss. The use of molds for a wide range of molding temperatures is also discussed in detail. Finally, a series of tables summarizing the mold fabrication methods, mold patterns and their dimensions, anti-adhesion coatings, molding conditions, molding methods, surface roughness values, glass substrates and their glass transition temperatures, and associated applications are presented. This review is intended as a roadmap for those interested in the glass molding field.

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Fabrication of microstructures on different materials by diode-pumped solid state laser writing for microfluidics applications

et al. 2012

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Fabrication of large-area microfluidics structures on glass by imprinting and diode-pumped solid state laser writing techniques

Cited by 7 publications

References 18 publications

Implementation of an optimized microfluidic mixer in alumina employing femtosecond laser ablation

Implementation of an optimized microfluidic mixer in alumina employing femtosecond laser ablation

A Comprehensive Review of Micro/Nano Precision Glass Molding Molds and Their Fabrication Methods

Fabrication of microstructures on different materials by diode-pumped solid state laser writing for microfluidics applications

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