Fabrication of miniaturized fluidic devices using SU-8 based lithography and low temperature wafer bonding

Svasek, P.; Svasek, E.; Lendl, Bernhard; Vellekoop, M.J.

doi:10.1016/j.sna.2004.03.055

Cited by 74 publications

(46 citation statements)

References 10 publications

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“…After the final step (hard bake at 150°C for 45 min) the material is completely cross-linked achieving its chemical stability and mechanical strength. More details on the fabrication procedure can be found in Svasek et al (2004). PDMS cover lids (15 9 15 mm 2 , thickness = 0.5 mm) were used as a waterproof gasket sheet on top of the microfluidic chip.…”

Section: Channel Design and Fabricationmentioning

confidence: 99%

Miniaturized flow cytometer with 3D hydrodynamic particle focusing and integrated optical elements applying silicon photodiodes

Rosenauer

Buchegger

Finoulst

et al. 2010

Microfluid Nanofluid

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In this study, the design, realization and measurement results of a novel optofluidic system capable of performing absorbance-based flow cytometric analysis is presented. This miniaturized laboratory platform, fabricated using SU-8 on a silicon substrate, comprises integrated polymer-based waveguides for light guiding and a biconcave cylindrical lens for incident light focusing. The optical structures are detached from the microfluidic sample channel resulting in a significant increase in optical sensitivity. This allows the application of standard solidstate laser and standard silicon-based photodiodes operated by lock-in-amplification resulting in a highly practical and effective detection system. The easy-to-fabricate singlelayer microfluidic structure enables independently adjustable 3D hydrodynamic sample focusing to an arbitrary position in the channel. To confirm the fluid dynamics and raytracing simulations and to characterize the system, different sets of microparticles and T-lymphocyte cells (Jurkat cell line) for vital staining were investigated by detecting the extinction (axial light loss) signal. The analytical classification via signal peak height/width demonstrates the high sensitivity and sample discrimination capability of this compact low-cost/low-power microflow cytometer.

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Section: Channel Design and Fabricationmentioning

confidence: 99%

Miniaturized flow cytometer with 3D hydrodynamic particle focusing and integrated optical elements applying silicon photodiodes

Rosenauer

Buchegger

Finoulst

et al. 2010

Microfluid Nanofluid

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“…Three microfluidic channels were fabricated from SU-8 in between the CaF 2 wafers using a fabrication procedure as found in. 13 The height of the channels was 23 lm and the channel volume was approximately 0.2 ll. A photograph of the device is shown in Fig.…”

Section: B Microfluidic Devicementioning

confidence: 99%

On-chip bio-analyte detection utilizing the velocity of magnetic microparticles in a fluid

Giouroudi

Driesche

Kosel

et al. 2011

Journal of Applied Physics

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A biosensing principle utilizing the motion of suspended magnetic microparticles in a microfluidic system is presented. The system utilizes the innovative concept of the velocity dependence of magnetic microparticles (MPs) due to their volumetric change when analyte is attached to their surface via antibody–antigen binding. When the magnetic microparticles are attracted by a magnetic field within a microfluidic channel their velocity depends on the presence of analyte. Specifically, their velocity decreases drastically when the magnetic microparticles are covered by (nonmagnetic) analyte (LMPs) due to the increased drag force in the opposite direction to that of the magnetic force. Experiments were carried out as a proof of concept. A promising 52% decrease in the velocity of the LMPs in comparison to that of the MPs was measured when both of them were accelerated inside a microfluidic channel using an external permanent magnet. The presented biosensing methodology offers a compact and integrated solution for a new kind of on-chip analysis with potentially high sensitivity and shorter acquisition time than conventional laboratory based systems.

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“…An open channel network is patterned on a substrate and then subsequently bonded onto a second substrate to form sealed cavities. This technique has been transferred to poly(dimethyl-siloxane) (PDMS), 5 poly-methyl-methacrylate (PMMA), 6,7 cyclic olefin copolymer (COC), 8 and SU-8 [9][10][11][12] photoresist. Complex multilevel fluidic devices in SU-8 12 and PDMS [13][14][15][16] have been achieved with the sequential stacking and bonding of multiple layers.…”

Section: Introductionmentioning

confidence: 99%

Complex three-dimensional high aspect ratio microfluidic network manufactured in combined PerMX dry-resist and SU-8 technology

et al. 2011

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In this paper we present a new fabrication method that combines for the first time popular SU-8 technology and PerMX dry-photoresist lamination for the manufacturing of high aspect ratio three-dimensional multi-level microfluidic networks. The potential of this approach, which further benefits from wafer-level manufacturing and accurate alignment of fluidic levels, is demonstrated by a highly integrated three-level microfluidic chip. The hereby achieved network complexity, including 24 fluidic vias and 16 crossing points of three individual microchannels on less than 13 mm 2 chip area, is unique for SU-8 based fluidic networks. We further report on excellent process compatibility between SU-8 and PerMX dryphotoresist which results in high interlayer adhesion strength. The tight pressure sealing of a fluidic channel (0.5 MPa for 1 h) is demonstrated for 150 lm narrow SU-8/PerMX bonding interfaces.

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Fabrication of miniaturized fluidic devices using SU-8 based lithography and low temperature wafer bonding

Cited by 74 publications

References 10 publications

Miniaturized flow cytometer with 3D hydrodynamic particle focusing and integrated optical elements applying silicon photodiodes

Miniaturized flow cytometer with 3D hydrodynamic particle focusing and integrated optical elements applying silicon photodiodes

On-chip bio-analyte detection utilizing the velocity of magnetic microparticles in a fluid

Complex three-dimensional high aspect ratio microfluidic network manufactured in combined PerMX dry-resist and SU-8 technology

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