Fabrication of nanocone arrays by two step metal assisted chemical etching method

Abstract

This work develops a novel method for preparing a moth eye structure, which has a sub-wavelength periodical Si nanocone structure on Si (100) substrate, using two-step metal assisted chemical etching (MACE). The 1 st and 2 nd MACE were respectively performed with the intention to form perpendicular Si nanowire arrays on a Si substrate and sharpening the Si nanowire arrays. We found the inhomogeneous absorption and aggregation of Au particles used as a catalyst for 2 nd MACE was important to obtain the nanocone shape. The obtained Si nanocone arrays showed superior anti-reflecting properties especially in wavelength below 600 nm compared to the Si nanowire arrays. A possible mechanism involved in the formation of the nanocone structure by the 2-step MACE is discussed in this paper.

Morphological and Optoelectrical Characterization of Silicon Nanostructures for Photovoltaic Applications

“…The growth mechanism of SiNWs is described by Peng et al [12]. The Ag + ions given by HF/AgN O 3 seize the valence band electrons of silicon.…”

“…These oxydation and dissolution will occur at the same time during the etching process. Then, silicon nanocones will be formed on silicon substrate by truncating the edge top of SiNWs, according to the study of Shimizu et al [12].…”

General corrosion during metal-assisted etching of n-type silicon using different metal catalysts of silver, gold, and platinum

“… 16 Complex 3D structures, e.g. helical pores, 17,18 spiraling pillars created by grid-shaped and star-shaped catalysts, 19 nanocone arrays, 20 and zigzag wires, 21 have also been reported. We successfully enhanced the conversion efficiency of solar cells by using Si nanohole arrays.…”

Parallel Aligned Nickel Nanocone Arrays for Multiband Microwave Absorption

“…Therefore, these factors are largely influential in magnetic and microwave properties of magnetic nanocones. Up to date, several methods have been developed to fabricate nanocones of various materials for pursuing the conical shape-enabled extraordinary properties, including chemical vapor deposition, plasma etching, , ion beam milling, , in situ polymerization, reactive ion etching, ,, electrochemical deposition, low-temperature hydrothermal method, and metal assisted chemical etching . In comparison with other materials, the fabrication methods for magnetic metallic nanocones are very limited. ,, Moreover, the nanocones produced by these methods are randomly sized with low height (less than 5 μm) and relatively small cone base (less than 500 nm) .…”