Fabrication of nanostructures with laser interference lithography

Xie, Qing; Hong, Ming Hui; Tan, Hua; Chen, G.X.; Shi, Lijuan; Chong, Tow Chong

doi:10.1016/j.jallcom.2006.02.115

Cited by 158 publications

(72 citation statements)

References 7 publications

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“…1(a)]. LIL combines the ease and speed of a direct illumination in a simple optical setup for applications, where large area (∼cm 2 ) patterns of lines or dots are needed, 15,16 as in our case [ Fig. 1(b)].…”

Section: Laser Interference Lithographymentioning

confidence: 99%

Fabrication of quartz microcylinders by laser interference lithography for angular optical tweezers

Santybayeva

Meghit

Desgarceaux

et al. 2016

J. Micro/Nanolith. MEMS MOEMS

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Abstract. The use of optical tweezers (OTs) and spin angular momentum transfer to birefringent particles allows new mechanical measurements in systems where torque and rotation are relevant parameters at the singlemolecule level. There is a growing interest in developing simple, fast, and inexpensive protocols to produce a large number of submicron scale cylinders of quartz, a positive uniaxial birefringent crystal, to be employed for such angular measurements in OTs. Here, we show that laser interference lithography, a method well known for its simplicity, fulfills these requirements and produces quartz cylindrical particles that we successfully use to apply and measure optical torque in the piconewton nm range in an optical torque wrench. © The Authors. Published by SPIE under a Creative Commons Attribution 3.0 Unported License. Distribution or reproduction of this work in whole or in part requires full attribution of the original publication, including its DOI.

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Section: Laser Interference Lithographymentioning

confidence: 99%

Fabrication of quartz microcylinders by laser interference lithography for angular optical tweezers

Santybayeva

Meghit

Desgarceaux

et al. 2016

J. Micro/Nanolith. MEMS MOEMS

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“…Laser interference lithography (LIL) is a simple and relatively inexpensive technique to create periodic structures over large areas. 11,12 The Lloyd's interferometer provides a flexible setup for laser LIL with the possibility to create nanoscale structures with different periodicities without additional optical alignment modifications. 11,12 Most researchers using Lloyd's systems have focused on creating uniform patterns over large areas.…”

Section: Introductionmentioning

confidence: 99%

“…11,12 The Lloyd's interferometer provides a flexible setup for laser LIL with the possibility to create nanoscale structures with different periodicities without additional optical alignment modifications. 11,12 Most researchers using Lloyd's systems have focused on creating uniform patterns over large areas. 13,14 However, for some studies, especially the those in the early device development stage, where systematic variation of parameters is necessary, fabrication of a variety of multiple and/or gradually changing structures on a single substrate is the desired goal.…”

Section: Introductionmentioning

confidence: 99%

Large area periodic, systematically changing, multishape nanostructures by laser interference lithography and cell response to these topographies

et al. 2013

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Hamilton, Douglas W.; and Mittler, Silvia, "Large area periodic, systematically changing, multishape nanostructures by laser interference lithography and cell response to these topographies" (2013 Abstract. The fabrication details to form large area systematically changing multishape nanoscale structures on a chip by laser interference lithography (LIL) are described. The feasibility of fabricating different geometries including dots, ellipses, holes, and elliptical holes in both x-and y-directions on a single substrate is shown by implementing a Lloyd's interferometer. The fabricated structures at different substrate positions with respect to exposure time, exposure angle and associated light intensity profile are analyzed. Experimental details related to the fabrication of symmetric and biaxial periodic nanostructures on photoresist, silicon surfaces, and ion milled glass substrates are presented. Primary rat calvarial osteoblasts were grown on ion-milled glass substrates with nanotopography with a periodicity of 1200 nm. Fluorescent microscopy revealed that cells formed adhesions sites coincident with the nanotopography after 24 h of growth on the substrates. The results suggest that laser LIL is an easy and inexpensive method to fabricate systematically changing nanostructures for cell adhesion studies. The effect of the different periodicities and transition structures can be studied on a single substrate to reduce the number of samples significantly.

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“…On the other hand, Lloyd's mirror interference lithography 25 (LIL) is an effective technique for fabricating grating structures, as it provides relatively large exposure area. 26 In order to fabricate the controllable electrode size and higher density of electrodes, in this study, we used LIL to fabricate composite nano-electrode on PMN-PT and adopted backswitching poling method to engineer domain walls and domain sizes. The paper proceeds with the following structure.…”

Section: Introductionmentioning

confidence: 99%

Study on dielectric and piezoelectric properties of 0.7 Pb(Mg1/3Nb2/3)O3-0.3 PbTiO3 single crystal with nano-patterned composite electrode

Chang

Huang

Bagal

et al. 2013

Journal of Applied Physics

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Effect of nano-patterned composite electrode and backswitching poling technique on dielectric and piezoelectric properties of 0.7 Pb(Mg 1/3 Nb 2/3 )O 3 -0.3 PbTiO 3 was studied in this paper. Composite electrode consists of Mn nano-patterns with pitch size of 200 nm, and a blanket layer of Ti/Au was fabricated using a nanolithography based lift-off process, heat treatment, and metal film sputtering. Composite electrode and backswitching poling resulted in 27% increase of d 33 and 25% increase of dielectric constant, and we believe that this is attributed to regularly defined nano-domains and irreversible rhombohedral to monoclinic phase transition in crystal.The results indicate that nano-patterned composite electrode and backswitching poling has a great potential in domain engineering of relaxor single crystals for advanced devices. V C 2013 AIP Publishing LLC. [http://dx

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Fabrication of nanostructures with laser interference lithography

Cited by 158 publications

References 7 publications

Fabrication of quartz microcylinders by laser interference lithography for angular optical tweezers

Fabrication of quartz microcylinders by laser interference lithography for angular optical tweezers

Large area periodic, systematically changing, multishape nanostructures by laser interference lithography and cell response to these topographies

Study on dielectric and piezoelectric properties of 0.7 Pb(Mg1/3Nb2/3)O3-0.3 PbTiO3 single crystal with nano-patterned composite electrode

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