2018
DOI: 10.1063/1.5039600
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Fabrication of novel biological substrate based on photolithographic process for surface enhanced Raman spectroscopy

Abstract: In this paper, a novel surface-enhanced Raman scattering (SERS) substrate based on Integrated Circuit (IC) process was designed, using photolithography, etching and other processes on the silicon wafer processing. Its surface morphology and Raman activity were characterized and tested. The relationship between the substrate’s photolithographic pattern and its Raman activity, stability and reproducibility has been analyzed and verified, and some suggestions for improvement of processing steps were given. This s… Show more

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Cited by 8 publications
(7 citation statements)
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“…The ordered structure of the metal nanoparticle substrate is a prerequisite for SERS enhancement [19][20][21]. Generally speaking, the enhancement reliability of SERS substrates prepared using large-scale equipment such as photolithography [22] or electron beam deposition [23] technology is ordinary. Based on the TiO 2 nanotubes array, Arenas-Hernandez et al constructed TiO 2 nanobowls and nanosheets on the surface of the Ti substrate in an orderly arrangement, on the nanocavities array substrate, by two-step electrochemical anodization.…”
Section: Introductionmentioning
confidence: 99%
“…The ordered structure of the metal nanoparticle substrate is a prerequisite for SERS enhancement [19][20][21]. Generally speaking, the enhancement reliability of SERS substrates prepared using large-scale equipment such as photolithography [22] or electron beam deposition [23] technology is ordinary. Based on the TiO 2 nanotubes array, Arenas-Hernandez et al constructed TiO 2 nanobowls and nanosheets on the surface of the Ti substrate in an orderly arrangement, on the nanocavities array substrate, by two-step electrochemical anodization.…”
Section: Introductionmentioning
confidence: 99%
“…In the extended work of SERS investigations, biomolecular detection is very essential for the diagnosis of human diseases. In the recent years, despite chemical methods, biomolecular detection has been elaborately investigated using AgNPs on pSi substrates. In support of these, Coluccio et al provided a detailed mechanism of cell adhesion and cell interaction with AuNPs/pSi substrate and further explained the chemical mechanisms of cell/surface interaction of AuNPs.…”
Section: Plasmonic Nps Capped Nanocrystalline Porous Siliconmentioning
confidence: 99%
“…In addition to the above stated various wet-chemically processed SiNSs, micro/nano Si nanostructures/patterns are attaining considerable research interests/efforts and extensive development prospects exist in the area of SERS sensing. ,, There are several approaches highlighted in the controlled fabrication of micro/nanostructures through PS deposition with chemical processing, photo/electro lithography, focused ion beam (FIB) techniques, ion beam processing, etc., , which result in high sensitivity and reproducibility of the SERS substrates. However, the morphology of SiNSs obtained by these processes is limited to 2D mode, which can reduce the accumulation of high-density hot-spots.…”
Section: Silicon Composed Hybrid Nanostructuresmentioning
confidence: 99%
“…Compared to colloidal metal substrates, solid substrates are characterized by homogeneity; ease of sample preparation, including surface functionalization and washing steps; and the allowing of the detection of single molecules in a small volume. The formation of solid substrates is carried out by self-assembly [ 97 , 98 , 99 ] or lithography [ 100 , 101 , 102 ] methods or using the combination of these methods, resulting in the creation of substrates with different SPR properties. Table 1 summarizes various approaches to create SERS-active substrates [ 86 , 94 ].…”
Section: Application Of Sers and Sers-combined Raman Techniques In The Detection Of Biomoleculesmentioning
confidence: 99%