2011
DOI: 10.1116/1.3592431
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Fabrication of ordered Au nanodot arrays utilizing anodic aluminum oxide templates formed on Si substrate

Abstract: The authors have fabricated Au nanodot arrays using anodic aluminum oxide (AAO). Two types of AAO, namely, hexagonal and matrix pores, were used as a template for Au deposition. Au nanodots with a controlled size between 20 and 80 nm were obtained by changing the pore size in the AAO template. AAO templates of 200 nm thick were fabricated using two-step anodization. Al films of 150 nm thick grown on Si (100) substrates were indented using the nanoimprint method prior to the anodization for the matrix array of … Show more

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Cited by 12 publications
(13 citation statements)
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“…The difference in the AAO height at the same pore diameter results in the shadow effect, which originates from the aspect ratio between the pore diameter and the pore height. 10 Thus, it was possible to control the size of Cr nanodots in terms of the aspect ratio of the AAO template. That is, the size of the Cr nanodots decreases with increasing aspect ratio of the AAO template.…”
Section: Experimental Methodsmentioning
confidence: 99%
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“…The difference in the AAO height at the same pore diameter results in the shadow effect, which originates from the aspect ratio between the pore diameter and the pore height. 10 Thus, it was possible to control the size of Cr nanodots in terms of the aspect ratio of the AAO template. That is, the size of the Cr nanodots decreases with increasing aspect ratio of the AAO template.…”
Section: Experimental Methodsmentioning
confidence: 99%
“…In addition, a well-known two-step anodizing process was performed on the Al films deposited on the Si substrate. 10 the desired unoxidized Al film thickness. After the first anodization, a partially formed anodic aluminum oxide was removed by immersing it in a mixture of 1.8 wt% H 2 CrO 4 and 7.4 wt% H 3 PO 4 at 75 C for 90 min.…”
Section: Introductionmentioning
confidence: 99%
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“…Among the advantages of utilization of such AAO templates are simplicity, possibility to use cheap equipment, tunability in preparation of nanostructures with different size and interparticle distance, and the possibility to work with different materials. 95,96 The AAO membrane method allows better control of NW parameters than other protocols for synthesis of similar nanostructures. Because AAO is also highly suitable for manufacturing of nanostructure arrays that provide high surface to volume ratio and good access for biomolecules due to vertical alignment, 97-100 we will consider this method in more detail.…”
Section: Anodic Porous Alumina Membranesmentioning
confidence: 99%