Fabrication of Poly-Ge-Based Thermopiles on Plastic

Makki, B.S.; Moradi, Mohsen; Moafi, A.; Mohajerzadeh, S.; Hekmatshoar, B.; Shahrjerdi, Davood

doi:10.1109/jsen.2004.836862

Cited by 6 publications

(4 citation statements)

References 13 publications

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“…These Al-Ge strips have a width of 20 µm and a length of 1 mm. Due to a charge carrier mobility of 100 cm 2 V −1 s −1 , Makki et al [76] report a Seebeck coefficient of about 100 µV K −1 . To reach an even higher detectivity, they tried to etch thin membranes in PET.…”

Section: Polymer-based Thermopilesmentioning

confidence: 99%

Review of micromachined thermopiles for infrared detection

Graf¹,

Arndt²,

Sauer³

et al. 2007

Meas. Sci. Technol.

194

120

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During the last few years, thermopiles have come increasingly under the spotlight of commercial infrared sensing. This growing interest has motivated us to write an overview of micromachined thermopiles. The first part deals with the Seebeck effect and discusses the most important physical parameters with their interactions. We also describe the main noise sources and give a derivation of the figures of merit and their relevance for thermopile detectors. In the second part, a number of material systems, techniques and micromachined structures are discussed on the basis of different examples. We explain the motivation behind miniaturized thermopile detectors and give a functional explanation of physical interrelations. Finally, different applications are presented and discussed in terms of their future potential.

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Section: Polymer-based Thermopilesmentioning

confidence: 99%

Review of micromachined thermopiles for infrared detection

Graf¹,

Arndt²,

Sauer³

et al. 2007

Meas. Sci. Technol.

194

120

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“…Researchers around the world are investigating a variety of approaches to develop sensitive and rapid detectors for numerous chemical and biological agents. Gaseous acids such as HCl or HCN and bases such as NH 3 are environmental hazards and there is considerable interest in finding sensors for these types of materials. The recent review of ammonia sensors by Timmer et al gives an excellent overview of some of the approaches being investigated [1].…”

Section: Introductionmentioning

confidence: 99%

“…We are producing thermopile-based devices [2][3][4][5][6][7] that detect the heat released from the reaction between an airborne pollutant and a chemical coating on the sensing junctions. These devices can be inexpensively mass produced.…”

Section: Introductionmentioning

confidence: 99%

Thermopile Sensors for the Detection of Airborne Pollutants

et al. 2007

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We have developed sensors for airborne pollutants using 36-junction thermopiles as the sensing platform. The thermopiles detect heat released when airborne pollutants react with chemical coatings applied to the sensing junctions. Our thermopiles consist of microfabricated thin film bismuthantimony junctions on thin polyimide or polyethylene terephthalate drumhead membranes that are supported by aluminum substrates. The sensitivity of our thermopiles (> 5 V-s/J) was measured using solvent evaporation and acid-base reactions. A copper oxalate coating on the sensing junctions enables the detection of ammonia vapor. The integrated sensor output is proportional to the logarithm of the ammonia concentration in the air injected into the test chamber. Subppm concentrations of ammonia in air can be detected. Detection of acid vapors (e.g., HCl) is also described.

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“…However, these structures are not conducive to improving the absorptivity of the thermopiles. 11,12 To enhance absorptivity, porous metal black materials, such as silver black, 13 platinum black, 14 gold black, 15 nanocomposite [16][17][18][19] and so on, were used as IR radiation absorbers, but these materials have disadvantages in large thermal conductivity and high cost. [20][21][22] In these methods, there is always a trade-off between reducing thermal conductivity and increasing absorptivity, and the fabrication processes are incompatible with the CMOS (Complementary Metal Oxide Semiconductor) processes.…”

mentioning

confidence: 99%

A Sensitivity Controllable Thermopile Infrared Sensor by Monolithic Integration of a N-channel Metal Oxide Semiconductor

Zhang

et al. 2021

ECS J. Solid State Sci. Technol.

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We report a sensitivity controllable infrared (IR) sensor composed of a thermopile and a n-channel metal oxide semiconductor (NMOS). In the sensor, the cathode of the thermopile is connected with the gate of NMOS. Such a sensor is fabricated by using a CMOS-compatible monolithic integration process. Compared with the separate thermopile IR sensor, sensitivity of the thermopile IR sensor integrated with NMOS can be remarkably enhanced by 357%. In addition, the drain bias voltage of the NMOS can be employed as a quick-response switch. The fabrication process of this device is quite simple and compatible with CMOS processes, thus such a thermopile IR sensor integrated with NMOS is low-cost and suitable for mass production. Moreover, the integration approach can be further applied to develop thermopile arrays for high-resolution imaging.

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Fabrication of Poly-Ge-Based Thermopiles on Plastic

Cited by 6 publications

References 13 publications

Review of micromachined thermopiles for infrared detection

Review of micromachined thermopiles for infrared detection

Thermopile Sensors for the Detection of Airborne Pollutants

A Sensitivity Controllable Thermopile Infrared Sensor by Monolithic Integration of a N-channel Metal Oxide Semiconductor

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