Fabrication of Slanted Grating Utilizing Reaction Ion Beam Etching: The Role of CHF<sub>3</sub> and O<sub>2</sub> Etching Atmosphere

Liu, Na; Ding, Gui-Jun; Mo, Guankong; Shi, Jia; Feng, Qi; Yu, Ping; Wang, Xiaohui; Xu, Wenjun; Zhang, Yikai; Niu, Pingjuan; Wang, Yan; Jia, Haiqiang; Chen, Hong

doi:10.1109/icsict55466.2022.9963283

2022 IEEE 16th International Conference on Solid-State &Amp; Integrated Circuit Technology (ICSICT) 2022

DOI: 10.1109/icsict55466.2022.9963283

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Fabrication of Slanted Grating Utilizing Reaction Ion Beam Etching: The Role of CHF₃ and O₂ Etching Atmosphere

Na Liu

Gui-Jun Ding

Guankong Mo

et al.

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2024

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Bottom angle control mechanism and optimization of slanted gratings for optical applications

Gao,

Liu,

et al. 2024

Journal of Vacuum Science &Amp; Technology A

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Slanted gratings serve as a crucial component in the optical waveguide couplers utilized in augmented virtual reality (AVR) devices. The flat bottom surface of slanted gratings ensures excellent diffraction efficiency of the couplers. However, achieving a flat bottom surface during the fabrication process poses challenges. This study presents a comprehensive investigation on the process control of the bottom angle using both simulation predictions based on available process parameters and experimental methods. The results obtained from the experimental procedures clearly demonstrate that the bottom angle is significantly influenced by the angular dependence of etching yield. Various ion incident energies and Ar/CHF3 gas components were employed to modulate the angular dependence of etching yield, thereby controlling the bottom angle in the reactive ion beam etching system. The effects of the ion incident energies and the flow ratios of the Ar/CHF3 gases on the bottom angle were thoroughly investigated. The findings of this study provide valuable insights for manufacturing slanted gratings and contribute to the advancement of AVR technology.

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Bottom angle control mechanism and optimization of slanted gratings for optical applications

Gao,

Liu,

et al. 2024

Journal of Vacuum Science &Amp; Technology A

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Fabrication of Slanted Grating Utilizing Reaction Ion Beam Etching: The Role of CHF₃ and O₂ Etching Atmosphere

Cited by 1 publication

References 5 publications

Bottom angle control mechanism and optimization of slanted gratings for optical applications

Bottom angle control mechanism and optimization of slanted gratings for optical applications

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Fabrication of Slanted Grating Utilizing Reaction Ion Beam Etching: The Role of CHF3 and O2 Etching Atmosphere

Cited by 1 publication

References 5 publications

Bottom angle control mechanism and optimization of slanted gratings for optical applications

Bottom angle control mechanism and optimization of slanted gratings for optical applications

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Fabrication of Slanted Grating Utilizing Reaction Ion Beam Etching: The Role of CHF₃ and O₂ Etching Atmosphere