Fabrication of three-dimensional freestanding metal micropipes for microfluidics and microreaction technology

Lang, Philipp; Neiß, S; Woias, Peter

doi:10.1088/0960-1317/21/12/125024

Cited by 4 publications

(2 citation statements)

References 34 publications

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“…The nonthermal processing enabled by fs laser assisted chemical etching yields low roughness on the sidewall of the fabricated hollow channels which ensures high surface quality of 3D metallic structures. Besides 3D silver and copper microstructures, this technique can be extended to fabricate other metals such as gold, nickel, and palladium since the metallization of glass capillaries with different kinds of metals has gained increasing attention. Previously, fs laser 3D fabrication suffers from a limited thickness of the end products due to the short working distances of high numerical aperture (NA) of objectives.…”

Section: Resultsmentioning

confidence: 99%

Glass‐Channel Molding Assisted 3D Printing of Metallic Microstructures Enabled by Femtosecond Laser Internal Processing and Microfluidic Electroless Plating

Zhong

et al. 2018

Adv Materials Technologies

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the trend of miniaturization, the 3D printing has become a power tool for producing various types of microstructures including photonics, microfluidics, micromechanics, and biostructures. [2][3][4][5][6] The most commonly used materials supporting 3D microprinting are based on polymer, as the polymer is easy to be processed. In the meantime, there is a high demand on the 3D metallic microstructures in applications such as microelectronics, terahertz photonics, microelectromechanical systems, and 3D electrodes, to name a few. [7][8][9][10] Generally speaking, the current additive manufacturing approach of 3D metal printing heavily relies on powder fusing methods such as laser selective melting and electron beam melting, [11] which is intrinsically a thermal process inevitably suffering from a thermal diffusion detrimental for high-resolution 3D printing. Therefore, several 3D metallic direct microprinting methods such as direct ink writing, [12] electrohydrodynamic printing, [13] local electrophoretic deposition, [14] laser induced forward transfer, [15] layer-by-layer electrodeposition, [16] laserinduced photoreduction, [17] and electrodeposition-based 3D printing [18] have been developed. Besides above-mentioned 3D 3D printing of metallic microstructures is highly desirable for many practical applications such as microelectronics, terahertz photonics, microelectromechanical systems, and electrochemisty. Unfortunately, high resolution microprinting of 3D metal structures with widely tunable feature sizes, high conductivities, high melting points, and highly smooth surfaces remains challenging for current microfabrication technologies. Herein, 3D printing of metallic microstructures of feature sizes ranging from ≈10 to ≈200 μm by combining femtosecond laser micromachining of 3D glass microchannels and microfluidic electroless plating is demonstrated. The proposed technique allows for producing 3D metallic structures of almost arbitrary geometries embedded in glass since the continuous flow of the plating solution enables controllable deposition of metal films inside the through microchannels. Moreover, freestanding metallic 3D microstructures are fabricated by removing the glass matrix with a wet chemical etching. As a nonthermal processing, the surface roughness of the fabricated metallic structures is as low as ≈20 nm. The 3D microstructures can be made of either silver or copper covered with a thin layer of silver, which are shown to have a high conductivity. As a proof-of-concept demonstration, a 3D metal scaffold structure with a size of ≈5 × 5 × 2 mm 3 is printed.

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Section: Resultsmentioning

confidence: 99%

Glass‐Channel Molding Assisted 3D Printing of Metallic Microstructures Enabled by Femtosecond Laser Internal Processing and Microfluidic Electroless Plating

Zhong

et al. 2018

Adv Materials Technologies

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“…Performing the synthesis process in a microfluidic environment has several advantages compared to macro-synthesis [13,14]. Due to the large surface area to volume ratio, heat and mass transport are considerably enhanced which leads to better uniformity of particles in terms of size distribution [15,16].…”

Section: Introductionmentioning

confidence: 99%

Uniform integration of gold nanoparticles in PDMS microfluidics with 3D micromixing

Saberi

Packirisamy

Wüthrich

2015

J. Micromech. Microeng.

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The integration of gold nanoparticles (AuNPs) on the surface of polydimethylsiloxane (PDMS) microfluidics for biosensing applications is a challenging task. In this paper we address this issue by integration of pre-synthesized AuNPs (in a microreactor) into a microfluidic system. This method explored the affinity of AuNPs toward the PDMS surface so that the pre-synthesized particles will be adsorbed onto the channel walls. AuNPs were synthesized inside a microreactor before integration. In order to improve the size uniformity of the synthesized AuNPs and also to provide full mixing of reactants, a 3D-micromixer was designed, fabricated and then integrated with the microreactor in a single platform. SEM and UV/Vis spectroscopy were used to characterize the AuNPs on the PDMS surface.

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Properties and Use of Microreactors

Barrow¹,

Taylor²,

and³

et al. 2013

Microreactors in Organic Chemistry and Catalysis

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Fabrication of three-dimensional freestanding metal micropipes for microfluidics and microreaction technology

Cited by 4 publications

References 34 publications

Glass‐Channel Molding Assisted 3D Printing of Metallic Microstructures Enabled by Femtosecond Laser Internal Processing and Microfluidic Electroless Plating

Glass‐Channel Molding Assisted 3D Printing of Metallic Microstructures Enabled by Femtosecond Laser Internal Processing and Microfluidic Electroless Plating

Uniform integration of gold nanoparticles in PDMS microfluidics with 3D micromixing

Properties and Use of Microreactors

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