2013
DOI: 10.1109/tnano.2013.2262100
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Fabrication of Ultrathin Silicon Nanoporous Membranes and Their Application in Filtering Industrially Important Biomolecules

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Cited by 11 publications
(5 citation statements)
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“…Although its fabrication via electrolytic etching was first discussed in 1956 by Uhlir, NPSi has continued to receive significant attention, with modern advanced fabrication and characterization techniques revealing its utility to an ever-growing list of processes and devices. Recent work has highlighted the excellent potential of NPSi in applications including nanofiltration, thermoelectrics, lithium-ion battery anodes, photovoltaics, and catalysis . Each of these applications stand to benefit from the integration of NPSi with decreased pore size, decreased interpore spacing, and increased pore aspect ratio, yet despite current advancements in nanofabrication technology, NPSi is nearing the limits of its accessible parameter space with regards to these three critical variables.…”
Section: Introductionmentioning
confidence: 99%
“…Although its fabrication via electrolytic etching was first discussed in 1956 by Uhlir, NPSi has continued to receive significant attention, with modern advanced fabrication and characterization techniques revealing its utility to an ever-growing list of processes and devices. Recent work has highlighted the excellent potential of NPSi in applications including nanofiltration, thermoelectrics, lithium-ion battery anodes, photovoltaics, and catalysis . Each of these applications stand to benefit from the integration of NPSi with decreased pore size, decreased interpore spacing, and increased pore aspect ratio, yet despite current advancements in nanofabrication technology, NPSi is nearing the limits of its accessible parameter space with regards to these three critical variables.…”
Section: Introductionmentioning
confidence: 99%
“…The high specific surface area of this kind of material confers them exceptional properties such as super-hydrophobicity [1,2], enhanced catalysis activity [3][4][5][6], and very selective filtering ability [7,8]. Various materials were used to synthesize nanoporous structures including metals (e.g., Au [6,[9][10][11][12][13][14], Pt [15][16][17][18], and Ag [19,20]), oxides (e.g., TiO 2 [21][22][23] and SiO 2 [24,25]) and carbon [26][27][28][29][30][31][32][33][34][35][36].…”
Section: Introductionmentioning
confidence: 99%
“…11.006 0008-6223/Ó 2014 Elsevier Ltd. All rights reserved. be retained [8,46]. On the other hand, in case of supercapacitors, it was observed that decreasing the pore size of the nanoporous materials used as electrode can result in an abnormal increase of the specific gravimetric capacity of the device [47,48].…”
Section: Introductionmentioning
confidence: 99%
“…Recently, nanoporous silicon (NPSi) has emerged as a promising material for a variety of applications including photovoltaics, , nanofiltration, thermoelectrics, , and catalysis . While there are numerous lithographic and mask-less chemical etching methods available for the production of NPSi, an approach known as metal-assisted chemical etching (MACE) has recently received significant attention for its ability to produce porous silicon with controllable pore size and spacing in a wet-etch-based manner, allowing for scalable processing .…”
mentioning
confidence: 99%