2018
DOI: 10.1016/j.snb.2017.12.132
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Fabrication of whole-thermoplastic normally closed microvalve, micro check valve, and micropump

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Cited by 64 publications
(30 citation statements)
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“…Generally, poly(dimethylsiloxane) (PDMS) is the most commonly used membrane material due to its good optical transparency and high elasticity for large deformations [10]. Other materials, such as thermal plastic polymer [11,12], shape memory alloy [13,14], glass [15], and more are also used in certain situations. As for the deflection of the membrane, various mechanical [16,17], electrostatic [18,19], pneumatic [20,21], magnetic [22,23], piezoelectric [24], or thermal [25] mechanisms have been proposed.…”
Section: Introductionmentioning
confidence: 99%
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“…Generally, poly(dimethylsiloxane) (PDMS) is the most commonly used membrane material due to its good optical transparency and high elasticity for large deformations [10]. Other materials, such as thermal plastic polymer [11,12], shape memory alloy [13,14], glass [15], and more are also used in certain situations. As for the deflection of the membrane, various mechanical [16,17], electrostatic [18,19], pneumatic [20,21], magnetic [22,23], piezoelectric [24], or thermal [25] mechanisms have been proposed.…”
Section: Introductionmentioning
confidence: 99%
“…An active valve with pneumatic actuation usually employs off-chip apparatus such as an air-compressor, a pressure regulator, etc., and does the required flow regulation by the regulation of the air pressure. The valve can be combined to form complex microfluidic devices, such as peristaltic pumps [11,19] and mixers [26]. However, when a low-cost and portable microfluidic system such as in POCT applications requires totally on-chip activation, the active technology may be considered excessive.…”
Section: Introductionmentioning
confidence: 99%
“…A number of reviews has described thermoplastic microfabrication methods [ 7 , 8 , 9 , 10 , 11 , 12 , 13 ], and recent work [ 14 ] discussed the transition from glass and silicon to thermoplastics, while discussing the available fabrication methods for these materials, methods that are often far faster and less expensive. As recently surveyed [ 15 , 16 ], a wide range of demonstrations has developed the use of thermoplastic substrates especially (e.g., [ 17 ] and the references within) in integrations of PDMS with thermoplastics such as poly(methyl methacrylate) (PMMA) and using methods such as plasma activated bonding and hot embossing. Very low cost fabrication methods have been emphasised for such membrane-based chips, for example the recent work [ 18 ] that thermally bonded layers of a variety of polymers to form microvalves.…”
Section: Introductionmentioning
confidence: 99%
“…Recent reports [ 15 , 16 ] demonstrated a very effective way of rapidly fabricating diaphragm-based PMMA and thermoplastic polyurethane (TPU) microfluidics. Rather than use cleanroom-based photolithography in a complex process (typically several days or more), these recent reports used a CO laser to pattern thermoplastics, forming arbitrarily complex microfluidics within about a day and without cleanroom equipment.…”
Section: Introductionmentioning
confidence: 99%
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