Fabry–Perot interference-based fiber-optic sensor for small displacement measurement

Chen, Ji-Huan; Huang, Xuguang; Zhao, Jia-Rong; Tao, Jin; He, Wei-Xin; Liu, Songhao

doi:10.1016/j.optcom.2010.04.041

Cited by 20 publications

(10 citation statements)

References 25 publications

Supporting

Mentioning

Contrasting

Unclassified

Order By: Relevance

“…Some typical micro-or nanometer-scale displacement sensors have been reported by many research groups [1][2][3][4][5][6]. Among these displacement sensors, capacitive sensors [7], piezoresistive sensors [8], eddy-current sensors [9], laser interferometers, and optical encoders [10,11] are considered to be most promising to address the issue. A closed-loop capacitive sensor can achieve nanometer resolution and a wide measurement range.…”

Section: Introductionmentioning

confidence: 99%

“…Laser-interferometerbased sensors, such as Fabry-Perot and Michelson interferometers, are extensively used as displacement sensors and calibration tools due to their high precision, good stability, repeatability, and antielectromagnetic interference [13]. For instance, a sensor based on a fiber-optic Fabry-Perot cavity was proposed by Chen et al to detect the displacement, which has a resolution of 16 nm as well as a linear response and a wide bandwidth [11]. A new approach to sense displacement by resonant cavities was proposed by Etxebarria et al, which has a subnanometer resolution [14].…”

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Subnanometer resolution displacement sensor based on a grating interferometric cavity with intensity compensation and phase modulation

Wang

Bai

et al. 2015

Appl. Opt.

View full text Add to dashboard Cite

A subnanometer resolution displacement sensor based on a grating interferometric cavity with intensity compensation and phase modulation is proposed and experimentally demonstrated in this paper. The grating interferometric cavity is composed of a frequency-stabilized laser source, a diffraction grating, and a mirror. To realize a subnanometer resolution, the intensity compensation and phase modulation technique are introduced, which are achieved by an intensity compensation light path, three closed placed photodetectors, a processing circuit and a piezoelectric ceramic transducer, and a lock-in amplifier. The intensity compensation technique can improve the stability of the output intensity signal greatly while the phase modulation technique can increase the signal-tonoise ratio dramatically. The detected signal is intensity modulated and processed by a particular arithmetic circuit. Experimental results indicate that the sensitivity of this displacement sensor is 44.75 mV/nm and the highest resolution can reach 0.017 nm, which is 27 times better than the one without intensity compensation and phase modulation. As a high-performance sensor with immunity to electromagnetic interference, this displacement sensor has potential to be used in nanoscience and technology.

show abstract

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Subnanometer resolution displacement sensor based on a grating interferometric cavity with intensity compensation and phase modulation

Wang

Bai

et al. 2015

Appl. Opt.

View full text Add to dashboard Cite

show abstract

“…The wavenumber spacing of

is only determined by L . Define the initial distance between the measured object and the fiber end to be L 0 , and then one can obtain the displacement of Δ L of the measured object as follows [ 50 ]:

One can calculate the value of Δ L from the measured data of

from Equation (11). Therefore, the measurement of small displacement can be hereby achieved by monitoring the wavenumber spacing

of the interference pattern formed by the F-P cavity.…”

Section: Experiments Results and Discussion Of Various Sensing Appmentioning

confidence: 99%

Research Progress on F-P Interference—Based Fiber-Optic Sensors

Huang

Tao²,

Huang

2016

Sensors

Self Cite

View full text Add to dashboard Cite

We review our works on Fabry-Perot (F-P) interferometric fiber-optic sensors with various applications. We give a general model of F-P interferometric optical fiber sensors including diffraction loss caused by the beam divergence and the Gouy phase shift. Based on different structures of an F-P cavity formed on the end of a single-mode fiber, the F-P interferometric optical sensor has been extended to measurements of the refractive index (RI) of liquids and solids, temperature as well as small displacement. The RI of liquids and solids can be obtained by monitoring the fringe contrast related to Fresnel reflections, while the ambient temperature and small displacement can be obtained by monitoring the wavelength shift of the interference fringes. The F-P interferometric fiber-optic sensors can be used for many scientific and technological applications.

show abstract

“…The extinction ratio is determined by the reflective intensity of FBG and the Fresnel reflective intensity of the SMF end face, which are insensitive to temperature. However, the Fresnel reflective intensity is sensitive to the ambient RI of the SMF end face, and the power reflection coefficient on SMF end face can be given by

R = \frac{{(||, n - n_{RI})}^{2}}{{(||, n + n_{RI})}^{2}}

where n RI is the ambient RI of SMF end face. With the ambient RI variation, the Fresnel reflective coefficient changes, which leads to change of extinction ratio of the spectrum.…”

Section: Operation Principlementioning

confidence: 99%

Simultaneous measurement of refractive index and temperature based on asymmetrical Fabry‐Perot interferometer

Lei

et al. 2019

Micro & Optical Tech Letters

View full text Add to dashboard Cite

We propose an asymmetrical Fabry‐Perot interferometer (AFPI) based on fiber Bragg gating (FBG) with low reflectivity and a segment of single‐mode fiber (SMF). The AFPI occurs in the narrow bandwidth of FBG. The theoretical analysis of measurement for refractive index (RI) and temperature is explained in detail, and experimental results are consistent with the theory. As the temperature and RI of environment change, the peak wavelength and the extinction ratio of the interferometer show different trends, and the measurement of RI and temperature simultaneously can be achieved. The fiber sensor has the RI sensitivity of 33.55 dB/RIU in the range from 1.333 to 1.413 and temperature sensitivity is 9 pm/°C in the range from 10°C to 70°C.

show abstract

Fabry–Perot interference-based fiber-optic sensor for small displacement measurement

Cited by 20 publications

References 25 publications

Subnanometer resolution displacement sensor based on a grating interferometric cavity with intensity compensation and phase modulation

Subnanometer resolution displacement sensor based on a grating interferometric cavity with intensity compensation and phase modulation

Research Progress on F-P Interference—Based Fiber-Optic Sensors

Simultaneous measurement of refractive index and temperature based on asymmetrical Fabry‐Perot interferometer

Contact Info

Product

Resources

About