Fast Fourier factorization for differential method and RCWA: a powerful tool for the modeling of non-lamellar metallic diffraction gratings

Mohamad, Habib; Es-Saidi, Soukaina; Blaize, Sylvain; Macı́as, Demetrio; Bénech, Pierre; Morand, Alain

doi:10.1007/s11082-020-2240-y

Cited by 12 publications

(11 citation statements)

References 22 publications

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“…Future work will consider improvements such as parallelization of the code and the Fast Fourier Factorization implementation of RCWA [30]. New semianalytical methods specially designed to work with rough surfaces will also be considered [31].…”

Section: Simulation Resultsmentioning

confidence: 99%

Experimental and numerical study of the emissivity of rolled aluminum

Menchón

López

Arrieta

et al. 2022

Infrared Physics & Technology

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Section: Simulation Resultsmentioning

confidence: 99%

Experimental and numerical study of the emissivity of rolled aluminum

Menchón

López

Arrieta

et al. 2022

Infrared Physics & Technology

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“…Depending on specific representations of e and h, different semi-analytical methods emerge. The most widely used (e.g., for the analysis of metasurfaces [6], gratings [14] and waveguides [24]) is rigorous coupled wave analysis (RCWA) method, wherein e and h are discretized using 2D Fourier basis on the xy-plane. In this paper, our development can be applied to semi-analytical methods in general (such as the method of lines [18]), although our implementation and numerical experiments focus in particular on the RCWA method.…”

Section: Established Semi-analytical Methods and Their Limitationsmentioning

confidence: 99%

“…Numerical evaluation of ( 14), however, is rather challenging. Prior works use a low-order Taylor expansion of the matrix exponentials to evaluate (14) [10,20]. But to use this expansion, section length must be excessively short (i.e., z i − z i−1 ≤ 0.1λ where λ is the wavelength), and a large number of sections are needed.…”

Section: High-order Semi-analytical Methodsmentioning

confidence: 99%

“…Numerical simulation is a fundamental tool for understanding photonic structures. Among many popular methods, semi-analytical methods, such as rigorous coupled wave analysis (RCWA) [15], have been widely used for analyzing such devices as metasurfaces [6], gratings [14] and waveguides [24]. In comparison to other methods, such as finite-difference time-domain (FDTD) methods, semi-analytical methods often have much lower computational cost.…”

Section: Introductionmentioning

confidence: 99%

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VarRCWA: An Adaptive High-Order Rigorous Coupled Wave Analysis Method

Zhu¹,

Zheng²

2022

Preprint

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Semi-analytical methods, such as rigorous coupled wave analysis, have been pivotal for numerical analysis of photonic structures. In comparison to other methods, they offer much faster computation, especially for structures with constant cross-sectional shapes (such as metasurface units). However, when the cross-sectional shape varies even mildly (such as a taper), existing semi-analytical methods suffer from high computational cost. We show that the existing methods can be viewed as a zeroth-order approximation with respect to the structure's cross-sectional variation. We instead derive a high-order perturbative expansion with respect to the cross-sectional variation. Based on this expansion, we propose a new semi-analytical method that is fast to compute even in presence of large cross-sectional shape variation. Furthermore, we design an algorithm that automatically discretizes the structure in a way that achieves a user specified accuracy level while at the same time reducing the computational cost.

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“…ties of subwavelength-grating structures and improving the efficiency of inverse pro solving for accurate dimensional determination. The representative studies inclu diffractive interface theory to bypass the eigen decomposition of ultrathin metasu [16], the perturbation theory to reduce eigen problems of non-lamellar layers [17-19 normal vectors to improve simulation convergence [20,21]. It is worth noting that studies were formulated and developed from theoretical structures composed of a sentative grating layer.…”

Section: Introductionmentioning

confidence: 99%

Efficient Rigorous Coupled-Wave Analysis Simulation of Mueller Matrix Ellipsometry of Three-Dimensional Multilayer Nanostructures

et al. 2022

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Mueller matrix ellipsometry (MME) is a powerful metrology tool for nanomanufacturing. The application of MME necessitates electromagnetic computations for inverse problems of metrology determination in both the conventional optimization process and the recent neutral network approach. In this study, we present an efficient, rigorous coupled-wave analysis (RCWA) simulation of multilayer nanostructures to quantify reflected waves, enabling the fast simulation of the corresponding Mueller matrix. Wave propagations in the component layers are characterized by local scattering matrices (s-matrices), which are efficiently computed and integrated into the global s-matrix of the structures to describe the optical responses. The performance of our work is demonstrated through three-dimensional (3D) multilayer nanohole structures in the practical case of industrial Muller matrix measurements of optical diffusers. Another case of plasmonic biosensing is also used to validate our work in simulating full optical responses. The results show significant numerical improvements for the examples, demonstrating the gain in using the RCWA method to address the metrological studies of multilayer nanodevices.

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Fast Fourier factorization for differential method and RCWA: a powerful tool for the modeling of non-lamellar metallic diffraction gratings

Cited by 12 publications

References 22 publications

Experimental and numerical study of the emissivity of rolled aluminum

Experimental and numerical study of the emissivity of rolled aluminum

VarRCWA: An Adaptive High-Order Rigorous Coupled Wave Analysis Method

Efficient Rigorous Coupled-Wave Analysis Simulation of Mueller Matrix Ellipsometry of Three-Dimensional Multilayer Nanostructures

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