Fast total scattering facility for 2D inspection of optical and functional surfaces

Kadkhoda, P.; Sakiew, Wjatscheslaw; Günster, Stefan; Ristau, Detlev

doi:10.1117/12.827864

Cited by 6 publications

(3 citation statements)

References 0 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Thus, the particle density of a sample can be determined via a Fast Total Scattering (Fast-TS) measurement setup, which scans the entire surface of an optic in the timescale of few minutes [5]. For the measurements presented in this study the distance of the measurement points (spatial step) is adjusted to 25 μm for the two dimensional TS mapping.…”

Section: Setup Of Coating Plant Guiding System and Characterization mentioning

confidence: 99%

Towards a magnetic field separation in Ion Beam Sputtering processes

et al. 2015

View full text Add to dashboard Cite

Section: Setup Of Coating Plant Guiding System and Characterization mentioning

confidence: 99%

Towards a magnetic field separation in Ion Beam Sputtering processes

et al. 2015

View full text Add to dashboard Cite

“…The decreased absorption may be due to the heat accompanying the plasma treatment causing a post-oxidation of the coating material. To investigate the effect of plasma treatment regarding scattering, the model system was measured in a Fast Total Scattering facility at 532 nm [6]. Considering base levels of 440 ppm for the model system and 460 ppm for the reference structure, no significant effect of the plasma treatment regarding scattering could be determined.…”

Section: Etching Effects On Multilayer Structuresmentioning

confidence: 99%

Etching behavior of optical thin films for different deposition techniques

Alig¹,

Günster²,

Ristau³

2015

Thin Solid Films

View full text Add to dashboard Cite

“…For the fast and complete mapping of the test surface the sample is moved in a spiral curve referred to the laser beam [3] . The advantages of FastTS compared to a dark field microscopy are: continuous and fast mapping of the samples, no adjustment of the focal position, TS scan in backward (reflectance) or forward (transmittance) directions, and finally a high dynamic range by recording of the scatter signal (more than seven orders of magnitude) which allows the detection of scattering from Nano-scatter centers.…”

Section: Fast Total Scattering Measurement (Fastts)mentioning

confidence: 99%

Mapping of total scattering as a tool for long term investigations in the cleaning state of the functional coated samples

et al. 2014

Self Cite

View full text Add to dashboard Cite

In optical coating production the generation of particles and defects is always an undesirable side effect and cannot be completely avoided in the handling steps of the optical components. Particles and defects on the substrates and in the functional coatings lead to scattering and absorption, which may cause a lower damage threshold for components of high power laser application.In this study, results of a long term investigation in the quality and the state of the cleanliness of multilayer systems produced by different deposition techniques are presented. Coated samples of different coating processes are investigated with the help of a Fast Total Scatter scanning system. Adapted data reduction algorithms for the determination of the particle sizes derived from the scattering measurements are developed and applied to the measurement results. On this basis, the density distribution of particle contamination on the samples is evaluated for selected coating runs over a long term period. The calculated statistics of the samples are related to the corresponding production conditions of individual coating plants to extract specific effects of the process environment.

show abstract

Fast total scattering facility for 2D inspection of optical and functional surfaces

Cited by 6 publications

References 0 publications

Towards a magnetic field separation in Ion Beam Sputtering processes

Towards a magnetic field separation in Ion Beam Sputtering processes

Etching behavior of optical thin films for different deposition techniques

Mapping of total scattering as a tool for long term investigations in the cleaning state of the functional coated samples

Contact Info

Product

Resources

About