, where L, T , and Z 0 represent the length, thickness, and equilibrium displacement of the buckled floating gate, respectively. We demonstrate that the switching frequency can be increased while maintaining the switching force when we downscale all the floating gate dimensions proportionally along with the scaling law. We also show that the switching voltage can be reduced down to less than 15 V while maintaining the ON/OFF operation range of the sense MOSFET by optimizing the cavity structure which sustains the inside buckled floating gate.