FBAR Sensor Array for in Liquid Operation

Enlund, Johannes; Martin, David; Yantchev, Ventsislav; Katardjiev, Ilia

doi:10.1109/jsen.2010.2051944

Cited by 5 publications

(4 citation statements)

References 6 publications

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“…It suggested that the LFE FBAR has a mass resolution of 0.06 ng cm −2 , which shows an improvement of at five times that of the quasi-shear FBARs [6,8,10]. And this value is sufficient for reliable biological measurements [5,14,20]. In addition, the achieved mass resolution of the LFE FBAR is comparable to that of the typical high performance quartz crystal microbalances which have been widely used in chemical and biological detections [17].…”

Section: Mass Sensitivity and Resolution In Airmentioning

confidence: 92%

A lateral field excited ZnO film bulk acoustic wave sensor working in viscous environments

Chen

Wang

et al. 2013

J. Micromech. Microeng.

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We present a lateral field excited ZnO film bulk acoustic resonator (FBAR) operated in pure-shear mode and analyze its performances in viscous liquids. The electrodes of the device are located on the film surface and normal to the c-axis of the ZnO film. The proposed device works near 1.44 GHz with a Q-factor up to 360 in air and 310 in water, which are higher than those of the quasi-shear thickness field excited FBAR. The resonant frequency is decreased with the increasing square root of the product of the viscosity and density with a linear dependence in the viscosity below 148.7 mPa s. The mass sensitivity of 670 Hz cm2 ng−1 was measured by monitoring the frequency change during the volatilization of saline solution loaded on the resonator. In addition, the levels of the noise and the mass resolutions were measured in various viscous environments. The proposed device yields the mass resolution of 670 Hz cm2 ng−1 and the high mass resolution of 0.06 ng cm−2. These results indicated that the lateral field excited ZnO FBAR had superior sensitivity for the bio-sensing applications in viscous biological liquids.

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Section: Mass Sensitivity and Resolution In Airmentioning

confidence: 92%

A lateral field excited ZnO film bulk acoustic wave sensor working in viscous environments

Chen

Wang

et al. 2013

J. Micromech. Microeng.

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“…Once used in a liquid environment, the acoustic energy will be dissipated by liquid and the FBARs will experience severe viscous damping, which results in great Q drops. (Enlund et al 2010;Pang et al 2012;Xu et al 2011;Zhang et al 2009). A reduction in Q of FBARs increases the noise floor in the fr monitoring, hence the minimum detectable mass is increased.…”

Section: Fbars Integrated With Microfluidic Devicesmentioning

confidence: 99%

Film bulk acoustic resonators (FBARs) as biosensors: A review

Zhang

Luo

Flewitt

et al. 2018

Biosensors and Bioelectronics

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Biosensors play important roles in different applications such as medical diagnostics, environmental monitoring, food safety, and the study of biomolecular interactions. Highly sensitive, label-free and disposable biosensors are particularly desired for many clinical applications. In the past decade, film bulk acoustic resonators (FBARs) have been developed as biosensors because of their high resonant frequency and small base mass (hence greater sensitivity), lower cost, label-free capability and small size. This paper reviews the piezoelectric materials used for FBARs, the optimisation of device structures, and their applications as biosensors in a wide range of biological applications such as the detection of antigens, DNAs and small biomolecules. Their integration with microfluidic devices and high-throughput detection are also discussed.

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“…[5][6][7] In addition, FBAR sensors are also popular for many advantages, such as small size, small base mass, and IC compatibility, which make it possible to be integrated on a chip. [8][9][10][11][12][13] In recent years, the FBAR sensor has become a new research direction for FBAR technology. 14 There are two modes of acoustic wave propagation in solid: longitudinal wave and shear wave.…”

Section: Introductionmentioning

confidence: 99%

A film bulk acoustic resonator pressure sensor based on lateral field excitation

Geng

et al. 2018

International Journal of Distributed Sensor Networks

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A high-sensitive thickness shear mode film bulk acoustic resonator pressure sensor based on lateral field excitation is designed with its structure simulated in environment of air and liquids. A finite element model of film bulk acoustic resonator pressure sensor structure is established to obtain frequency variation under different pressure conditions by parameter sweep method when the multi-physics fields are added to the model. The results of simulation show that the pressure sensor's resonance frequency is 2.114 GHz and pressure sensitivity is 1200 Hz/kPa in air. In liquid environment, film bulk acoustic resonator pressure sensor displays a pressure sensitivity of 325 Hz/kPa in ethanol, 475 Hz/kPa in deionized water, and 612.5 Hz/kPa in glycerol. This film bulk acoustic resonator pressure sensor has been proved to be highly sensitive both in air and liquid environment and has the potential to be used in biomedical applications.

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FBAR Sensor Array for in Liquid Operation

Abstract: This letter discusses the design of thickness shear mode thin-film bulk acoustic resonator (FBAR) sensor array for in liquid operation with respect to minimizing the observed Q-degradation and crosstalk.

Cited by 5 publications

References 6 publications

A lateral field excited ZnO film bulk acoustic wave sensor working in viscous environments

A lateral field excited ZnO film bulk acoustic wave sensor working in viscous environments

Film bulk acoustic resonators (FBARs) as biosensors: A review

A film bulk acoustic resonator pressure sensor based on lateral field excitation

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