(Fe,Mn)<sub>3</sub>O<sub>4</sub> Nanochannels Fabricated by AFM Local‐Oxidation Nanolithography using Mo/Poly(methyl methacrylate) Nanomasks

Pellegrino, L.; Yanagisawa, Yoshihiko; Ishikawa, M.; Matsumoto, Takuya; Tanaka, Hidekazu; Kawai, Tomoji

doi:10.1002/adma.200600997

Cited by 37 publications

(29 citation statements)

References 38 publications

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“…[10][11][12] In the amplitude modulation ͑AM͒ mode 13 ͑AM-AFM͒, either the sample or the tip is scanned in a raster fashion while a feedback mechanism keeps the oscillation amplitude of the cantilever-tip system a fixed value ͑set-point amplitude͒. The variations in the z-scanner position are reported as topographic images while the variations in the phase shift between the external excitation and the cantilever response provide a compositional map of the surface.…”

Section: Introductionmentioning

confidence: 99%

Theory of phase spectroscopy in bimodal atomic force microscopy

Lozano¹,

García²

2009

Phys. Rev. B

115

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We develop a theoretical formalism to describe bimodal atomic force microscopy ͑AFM͒ experiments. The theory relates observables such as amplitudes and phase shifts to physical properties of the tip-surface interaction. The theory is compatible with point-mass and continuous models of the cantilever-tip system. We explain the ability of the bimodal AFM to map compositional variations under the influence of very small conservative forces. This is achieved by representing the dependence of the phase shift or amplitude of one eigenmode with respect to the amplitude or phase shift of the other mode. The agreement obtained between the theory and the numerical simulations validates the theoretical formalism.

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Section: Introductionmentioning

confidence: 99%

Theory of phase spectroscopy in bimodal atomic force microscopy

Lozano¹,

García²

2009

Phys. Rev. B

115

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“…Rolandi et al first reported AFM lithography using Mo and Mo/poly͑methyl methacryate͒͑PMMA͒ nanomasks for the patterning of structures on Si and SiO 2 , 11 and we have successfully expanded the scope of this technique to the nanofabrication of transition metal oxides. 12 This Mo/PMMA technique enables us to fabricate various kinds of nanostructures even in insulating materials in principle. In this technique, the mask includes an organic PMMA layer, which brings a complicated procedure.…”

Section: Introductionmentioning

confidence: 99%

Fabrication of (Fe,Mn)3O4 ferromagnetic oxide nanostructure using molybdenum nanomask atomic force microscope lithography

Goto

Tanaka

Kawai

2009

Journal of Applied Physics

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We reported the fabrication of Fe2.5Mn0.5O4 (FMO) ferromagnetic oxide nanostructure using molybdenum (Mo) nanomask atomic force microscope (AFM) lithography technique for oxide nanospintronics applications. This technique enables us to prepare transition metal oxide nanostructures down to 200nm. The hard x-ray photoemission spectroscopy revealed that the resulting nanostructures preserve a fine electric structure as spintronics oxide same as unprocessed films. The resulting FMO nanostructure showed the magnetoresistance of about −0.11% to −0.14% at the magnetic field of 3000Oe, which value was similar to that of FMO film. These indicate that this technique can construct well defined nanoscale oxides both in structure and physical properties.

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“…Thus, templates to build molecular architectures, 6,7 resist masks, 8 nanomechanical resonators, 9,10 or several nanoelectronic devices and transistors [11][12][13][14] have been fabricated by local oxidation. In AFM oxidation, the tip is used as a cathode and the water meniscus formed between the tip and the surface is the source of the oxyanions species.…”

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confidence: 99%

Nanoscale space charge generation in local oxidation nanolithography

Chiesa¹,

García²

2010

Applied Physics Letters

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We have measured the surface potential and the space charge generated during the first stages of atomic force microscopy field-induced oxidation. Space charge densities are about 10 17 cm −3 for oxidation times below 10 ms. In a dry atmosphere, the surface potential is negative. However, in humid air the surface potential could be either positive or negative. This effect is attributed to a screening effect of the water molecules. These results explain and support the use of local oxidation patterns as templates for building molecular architectures. They also establish the space charge build up as an intrinsic feature in local oxidation experiments. © 2010 American Institute of Physics. ͓doi:10.1063/1.3459976͔Atomic force microscopy ͑AFM͒ oxidation nanolithography is a robust and flexible tip-based nanofabrication method [1][2][3][4][5] that is used to fabricate high resolution patterns and nanoscale devices. Thus, templates to build molecular architectures, 6,7 resist masks, 8 nanomechanical resonators, 9,10 or several nanoelectronic devices and transistors [11][12][13][14] have been fabricated by local oxidation. In AFM oxidation, the tip is used as a cathode and the water meniscus formed between the tip and the surface is the source of the oxyanions species. 15 The strong localization of the electrical field lines near the tip apex and the lateral confinement of the oxyanions species within the liquid meniscus give rise to a nanometer-size oxide dot. [16][17][18][19][20] The kinetics of the oxidation process is influenced by the generation of a space charge. [21][22][23] The model by Dagata et al. 21,24 considers two competing mechanisms, a fast oxidation process that applies to the initial stages ͑below 1 s͒ and a slower, indirect process that applies for longer oxidation times and involves space charge. Dubois and Bubendorff's model is based on a charge trapping-detrapping mechanism. 23 Most of the AFM oxidation nanolithography applications involve oxidation times below 1 s. Recently, local oxide patterns have been used as high resolution templates for the growth of functional materials such as protein carriers 7 or single molecule magnets. 25 The underlying mechanism behind the organization of molecular architectures is based on the electrostatic interactions between the charged or polarized molecules and the space charges trapped inside the local oxides. However, there is no experimental evidence that supports the existence of space charges for short oxidation times. In addition, the sign of the charge has not been measured.Here, we perform Kelvin probe force microscopy ͑KPFM͒ experiments to determine the space charge sign and density. The measurements establish the presence of a space charge build up during the earlier stages of the oxidation process ͑below 10 ms͒. The sign of the apparent space charge depends on the relative humidity inside the chamber where the KPFM measurements are performed. In dry conditions ͑N 2 gas environment͒ the observed charge is always negative. However, in the presence of wat...

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(Fe,Mn)₃O₄ Nanochannels Fabricated by AFM Local‐Oxidation Nanolithography using Mo/Poly(methyl methacrylate) Nanomasks

Cited by 37 publications

References 38 publications

Theory of phase spectroscopy in bimodal atomic force microscopy

Theory of phase spectroscopy in bimodal atomic force microscopy

Fabrication of (Fe,Mn)3O4 ferromagnetic oxide nanostructure using molybdenum nanomask atomic force microscope lithography

Nanoscale space charge generation in local oxidation nanolithography

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(Fe,Mn)3O4 Nanochannels Fabricated by AFM Local‐Oxidation Nanolithography using Mo/Poly(methyl methacrylate) Nanomasks

Cited by 37 publications

References 38 publications

Theory of phase spectroscopy in bimodal atomic force microscopy

Theory of phase spectroscopy in bimodal atomic force microscopy

Fabrication of (Fe,Mn)3O4 ferromagnetic oxide nanostructure using molybdenum nanomask atomic force microscope lithography

Nanoscale space charge generation in local oxidation nanolithography

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Product

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(Fe,Mn)₃O₄ Nanochannels Fabricated by AFM Local‐Oxidation Nanolithography using Mo/Poly(methyl methacrylate) Nanomasks