Feasibility of transmission x-ray microscopy at 4 keV with spatial resolutions below 150 nm

Kaulich, Burkhard; Oestreich, Sebastian; Salomé, Murielle; Barrett, R.; Susini, J.; Wilhein, Thomas; Fabrizio, E. Di; Gentili, M.; Charalambous, P.

doi:10.1063/1.125536

Cited by 63 publications

(10 citation statements)

References 7 publications

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“…A number of methods have been developed, most notably one termed 3DXRD at the European Synchrotron radiation facility (ESRF), in collaboration with the Risø National Lab 113 and another at the Applied Photon Source (APS). 114 5 Landmark achievements in focussing for soft Fresnel zone plates (FZPs), 69,[82][83][84][85][86][87][88][89] hard FZPs, 72,[89][90][91][92][93][94] Kirkpatrick-In the former a small, usually letter-box shaped, monochromatic beam is sent through a sample and, as in absorption tomography, the sample is rotated around an axis perpendicular to the beam. Each irradiated grain diffracts part of the incident beam.…”

Section: Crystal Grain Imagingmentioning

confidence: 99%

Quantitative X-ray tomography

Maire¹,

Withers²

2013

International Materials Reviews

1,086

601

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X-ray computer tomography (CT) is fast becoming an accepted tool within the materials science community for the acquisition of 3D images. Here the authors review the current state of the art as CT transforms from a qualitative diagnostic tool to a quantitative one. Our review considers first the image acquisition process, including the use of iterative reconstruction strategies suited to specific segmentation tasks and emerging methods that provide more insight (e.g. fast and high resolution imaging, crystallite (grain) imaging) than conventional attenuation based tomography. Methods and shortcomings of CT are examined for the quantification of 3D volumetric data to extract key topological parameters such as phase fractions, phase contiguity, and damage levels as well as density variations. As a non-destructive technique, CT is an ideal means of following structural development over time via time lapse sequences of 3D images (sometimes called 3D movies or 4D imaging). This includes information needed to optimise manufacturing processes, for example sintering or solidification, or to highlight the proclivity of specific degradation processes under service conditions, such as intergranular corrosion or fatigue crack growth. Besides the repeated application of static 3D image quantification to track such changes, digital volume correlation (DVC) and particle tracking (PT) methods are enabling the mapping of deformation in 3D over time. Finally the use of CT images is considered as the starting point for numerical modelling based on realistic microstructures, for example to predict flow through porous materials, the crystalline deformation of polycrystalline aggregates or the mechanical properties of composite materials.

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Section: Crystal Grain Imagingmentioning

confidence: 99%

Quantitative X-ray tomography

Maire¹,

Withers²

2013

International Materials Reviews

1,086

601

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“…Monochromaticity of ∆ E/E=10 -4 was provided by a Si<111> double crystal monochromator. The optical scheme of the full-field imaging microscope is similar to a conventional visible light transmission microscope with critical illumination: a focusing optic condenses the light onto the specimen, and the image is magnified 150 times by an objective lens onto a spatially resolving detector 15 . The condenser used for these experiments was a Au zone plate with a diameter of 1.2 mm, an outermost zone width of 800 nm, a focal length of 3600 mm, which has a measured first order diffraction efficiency of 19 %.…”

Section: Differential Interference Contrast (Dic) Microscopymentioning

confidence: 99%

Novel diffractive optics for x-ray beam shaping

Fabrizio¹,

Cojoc

Cabrini

et al. 2002

SPIE Proceedings

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In our days, there is an increased interest for extreme ultraviolet and x-ray microscopy, which is mainly due to the availability of nearly ideal optical sources for diffractive optics. Synchrotrons of the latest generation and free electron lasers (in the near future) are sources that can produce x-ray beams with low divergence, whose wavelength can be tuned over a range of several keV and whose spectrum can be monochromatised within a band pass ∆λ/λ < 10 -4 . In this paper we present the design, fabrication and use of novel diffractive optical elements that, beyond simple focusing, can perform new optical functions in the range of soft X-rays: multi-focusing in single or multiple focal planes and beam shaping of a generic monochromatic beam into a desired continuous geometrical pattern. The design is based on scalar diffraction approaches using iterative or direct algorithms to calculate the optical function. Diffractive optical elements with 100x100 microns size and 100 nanometers resolution have been fabricated using ebeam lithography and their optical functions have been tested in differential interference contrast microscopy. We suggest their use also in mask-less lithography and chemical vapor deposition induced by extreme ultraviolet and xray radiation.

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“…5b, in order to separate the (ϩ1, 0) and (0, ϩ1) wave fronts from the (0, 0), (Ϫ1, 0), and (0, Ϫ1) wave fronts. 48 This introduces a weak, oblique illumination and limits the usable image field. (0, 0) contributions are blocked by a central stop close to the CCD, which was a Princeton CCD (EEV chip with 1340 ϫ 1240 pixels and a pixel size of 20 m ϫ 20 m) coupled by a two-stage visible-light optical system to a Gd 2 O 2 S:Tb powder phosphor screen with a thickness of 10 m. 49,50 As a good test object for phase-sensitive imaging at 4 keV, poly(methylmethacrylate) (PMMA) structures with a thickness t ϭ 2 m are used.…”

Section: A Differential Interference Contrast X-ray Imaging With a Fmentioning

confidence: 99%

Differential interference contrast X-ray microscopy with twin zone plates at ESRF beamline ID21

Wilhein¹,

Kaulich

Fabrizio

et al. 2003

J. Phys. IV France

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We describe a novel approach for converting the specimens phase information into strong image contrast in the x-ray region, the differential interference contrast x-ray microscopy (X-DIC). In the used setup, X-DIC operation was accomplished by a twin zone plate (TZP), i.e. two zone plates on both sides of the same substrate, laterally shifted by about one outermost zone width. Once a TZP has been successfully produced by means of especially developed nanofabrication processes, it is as easy to use as a single zone plate, without any alignment difficulty or further requirements to the coherence of the illumination. The tremendeous contrast enhancement was demonstrated at the microscopy beamline ID21 at ESRF in Grenoble for test objects and biological samples. TZPs allow for full field X-DIC imaging as well as for DIC scanning transmission x-ray microscopy. The first experiments were carried out at 0.31nm wavelength (4 keV photon energy), and features down to approx. 160 nm could be resolved in X-DIC

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Feasibility of transmission x-ray microscopy at 4 keV with spatial resolutions below 150 nm

Cited by 63 publications

References 7 publications

Quantitative X-ray tomography

Quantitative X-ray tomography

Novel diffractive optics for x-ray beam shaping

Differential interference contrast X-ray microscopy with twin zone plates at ESRF beamline ID21

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