Feasibility study of TFT-LCD array tester using low voltage micro-columns

Kim, H. S.; Kim, D. W.; Ahn, Seungjoon; Kim, Y. C.; Park, S. S.; Park, K. W.; Hwang, Nam; Jin, Sang Won; Bae, Sangwoo

doi:10.1016/j.mee.2007.12.042

Cited by 12 publications

(3 citation statements)

References 4 publications

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“…To obtain the quality electrodes, precise machining of the very small holes with aperture of several µm is required and these days the micro-electro-mechanical system (MEMS) technologies are used for the machining [1][2][3] . One of the most promising advantages of the microcolumn is that the small multiple electron beam (e-beam) sources might be possibly constructed using many microcolumns, which today's semiconductor and display industries need in order to overcome the low throughput of the e-beam equipment being used in the lithography and inspection or critical dimension (CD) measurement of the semiconductor devices [4][5][6][7][8][9][10] . Fig.…”

Section: Introductionmentioning

confidence: 99%

Design of Low-Energy Modest-Resolution (sub-50 nm) Microcolumn Easy to Fabricate

Oh¹,

Ahn²,

Kim³

et al. 2014

Asian J. Chem.

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The electrodes of the electron optical microcolumn are precisely fabricated using the micro-electro-mechanical systems technology, which makes it possible to minimize the electron beam size as well as the optical aberrations compared with those of the conventional electron columns. It is, however, necessary to make the apertures of the electrodes very small to obtain high resolution and it takes lots of time and effort to align the apertures of the electrodes. In this work, we have designed a new structure of electron optical microcolumn in which the apertures of the electrodes are relatively large, so the alignment is very easy to carry out while maintaining the modest resolving power (sub 50-nm).

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Section: Introductionmentioning

confidence: 99%

Design of Low-Energy Modest-Resolution (sub-50 nm) Microcolumn Easy to Fabricate

Oh¹,

Ahn²,

Kim³

et al. 2014

Asian J. Chem.

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show abstract

“…The defects generated during the fabrication procedure of the TFT-LCD (Thin Film Transistor-Liquid Crystal Display) panel have great effect on the yield of the panels. Hence the inspection of the TFT device is a very important step in the production of the LCD panels, where the e-beam equipment has been used for a long time [1]. The conventional electron bean (e-beam) equipment for the inspection of the TFT device has been based on the bulky electron column where the kinetic energy of the e-beam is higher than 10 kV.…”

Section: Introductionmentioning

confidence: 99%

Inspection of the TFT Devices Using the Low-Energy Electron Beam Emitted from the Microcolumn

Ahn

et al. 2012

MSF

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The inspection of the TFT device for the LCD panel has been usually carried out by the large-scale electron column where the kinetic energy of the electron beam is higher than 10 kV, which has many disadvantages for the inspection. In this work, we replaced the bulky electron column with a tiny microcolumn and carried out the inspection of the TFT device. The result shows that the low-energy e-beam inspection can clearly observe the physical defects of the devices and also identify the abnormal electrical behavior caused by the defects in the device.

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“…As an inspection application, microcolumns have demonstrated the possibility of inspecting open defects in a display panel thin film transistor-liquid crystal display (TFT-LCD) [6][7] The raster scan images of TFT-LCD panel were obtained using a 300 eV microcolumn under specific operation conditions. The results showed that a low energy microcolumn can be adopted in the production process to detect the location and types of various open defects.…”

Section: Introductionmentioning

confidence: 99%

Experimental Study on the Operation of a Keyhole-Shaped Lens in a Microcolumn

Jin²,

Choi³

et al. 2011

Journal of the Optical Society of Korea

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An advanced microcolumn is proposed which adopts a modified einzel lens structure. The newly designed einzel lens is composed of four electrodes. The two center electrodes are specially designed electrostatic quadrupole (EQ) einzel lenses having keyhole instead of circular apertures. We constructed the advanced microcolumn with the EQ-einzel lenses, and operated the newly designed microcolumn in single lens mode and double-lens mode. The preliminary results show that the EQ-einzel lens can improve the performance of the micro-column for large sample applications.

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Feasibility study of TFT-LCD array tester using low voltage micro-columns

Cited by 12 publications

References 4 publications

Design of Low-Energy Modest-Resolution (sub-50 nm) Microcolumn Easy to Fabricate

Design of Low-Energy Modest-Resolution (sub-50 nm) Microcolumn Easy to Fabricate

Inspection of the TFT Devices Using the Low-Energy Electron Beam Emitted from the Microcolumn

Experimental Study on the Operation of a Keyhole-Shaped Lens in a Microcolumn

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