To improve the high-frequency properties of Fe-based thin films, doped and pure Fe thin films were obliquely deposited on Si (100) substrate by RF-magnetron sputtering. Vibrating sample magnetometer (VSM) measurements show obvious in-plane uniaxial magnetic anisotropy in both doped and pure Fe thin films, and enhancement effects of doping on Soft magnetic properties were also observed. Microwave permeability measurements indicate that the resonance frequency and permeability of pure Fe films are much larger than those of doped Fe thin films. Damping factors of Fe thin films deposited at different oblique angles were further investigated.