Femtosecond laser-induced breakdown spectroscopy: Elemental imaging of thin films with high spatial resolution

Ahamer, Christoph M.; Riepl, K.; Huber, N.; Pedarnig, J.D.

doi:10.1016/j.sab.2017.08.005

Cited by 20 publications

(6 citation statements)

References 59 publications

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“…The LIBS technique has been employed for chemical imaging with element-specific spatial contrast (''element imaging'') of many different materials 1 including biological samples, [2][3][4] ceramics, 5 metal coatings, 6 metals, [7][8][9][10][11] nanoparticles, 12,13 Li-ion solid-state electrolytes, 14,15 printed circuit boards, 16 and thin films. 17 The achievable spatial resolution depends on the size of the ablation crater. In most studies on LIBS imaging, nanosecond (ns) laser pulses have been employed and the crater size was varying in the range of tens of mm, depending on experimental parameters such as the laser pulse energy.…”

Section: Introductionmentioning

confidence: 99%

Femtosecond Single-Pulse and Orthogonal Double-Pulse Laser-Induced Breakdown Spectroscopy (LIBS): Femtogram Mass Detection and Chemical Imaging with Micrometer Spatial Resolution

et al. 2021

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Femtosecond laser-induced breakdown spectroscopy (fs-LIBS) is employed to detect tiny amounts of mass ablated from macroscopic specimens and to measure chemical images of microstructured samples with high spatial resolution. Frequency-doubled fs-pulses (length 400 fs, wavelength 520 nm) are tightly focused with a Schwarzschild microscope objective to ablate the sample surface. The optical emission of laser-induced plasma (LIP) is collected by the objective and measured with an echelle spectrometer equipped with an intensified charge-coupled device camera. A second fs-laser pulse (1040 nm) in orthogonal beam arrangement is reheating the LIP. The optimization of the experimental setup and measurement parameters enables us to record single-pulse fs-LIBS spectra of 5 nm thin metal layers with an ablated mass per pulse of 100 femtogram (fg) for Cu and 370 fg for Ag films. The orthogonal double-pulse fs-LIBS enhances the recorded emission line intensities (two to three times) and improves the contrast of chemical images in comparison to single-pulse measurements. The size of ablation craters (diameters as small as 1.5 µm) is not increased by the second laser pulse. The combination of minimally invasive sampling by a tightly focused low-energy fs-pulse and of strong enhancement of plasma emission by an orthogonal high-energy fs-pulse appears promising for future LIBS chemical imaging with high spatial resolution and with high spectrochemical sensitivity.

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Section: Introductionmentioning

confidence: 99%

Femtosecond Single-Pulse and Orthogonal Double-Pulse Laser-Induced Breakdown Spectroscopy (LIBS): Femtogram Mass Detection and Chemical Imaging with Micrometer Spatial Resolution

et al. 2021

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“…Moreover, it is easy to appreciate that a smaller crater implies a lower ablated mass, a smaller number of emitters (excited atoms/ions or molecules) in the plasma, and thus a lower measured signal. In such cases, argon gas can be used to flow the plasma region to obtain higher emission properties as the plasma is thermally insulated and better confined compared to that during ablation in air. − However, there is always a trade-off between resolution and sensitivity (i.e., the LoD). As an example, the evolution of the magnesium (Mg) LoD as a function of the crater diameter is shown in Figure e.…”

Section: Insights Into Libs Imagingmentioning

confidence: 99%

“…Other studies have proposed offsetting such losses with an external addition to the experimental setup. , These approaches work, but at the cost of adding experimental constraints. For example, Ahamer et al used a femtosecond laser for LIBS imaging, resulting in a high spatial resolution of approximately 6 μm . To compensate for the sensitivity loss, a strategy with a second pulse for the reheating and excitation of the plume was used by the same laboratory …”

Section: Insights Into Libs Imagingmentioning

confidence: 99%

Laser-Induced Breakdown Spectroscopy Imaging for Material and Biomedical Applications: Recent Advances and Future Perspectives

et al. 2023

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“…Short nanosecond laser pulses are employed for the sampling of material, typically, as stable and robust nanosecond laser sources operating at various wavelengths, pulse energies and repetition rates are available. However, ultrashort femtosecond lasers offer several advantages for LIBS compared to conventional nanosecond lasers and femtosecond-LIBS experiences a growing number of applications (e.g., [31][32][33][34][35][36][37][38]). In most studies, the optical emission of atomic and molecular species in the plasma is analyzed spectroscopically.…”

Section: Introductionmentioning

confidence: 99%

Review of Element Analysis of Industrial Materials by In-Line Laser—Induced Breakdown Spectroscopy (LIBS)

et al. 2021

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Laser-induced breakdown spectroscopy (LIBS) is a rapidly developing technique for chemical materials analysis. LIBS is applied for fundamental investigations, e.g., the laser plasma matter interaction, for element, molecule, and isotope analysis, and for various technical applications, e.g., minimal destructive materials inspection, the monitoring of production processes, and remote analysis of materials in hostile environment. In this review, we focus on the element analysis of industrial materials and the in-line chemical sensing in industrial production. After a brief introduction we discuss the optical emission of chemical elements in laser-induced plasma and the capability of LIBS for multi-element detection. An overview of the various classes of industrial materials analyzed by LIBS is given. This includes so-called Technology materials that are essential for the functionality of modern high-tech devices (smartphones, computers, cars, etc.). The LIBS technique enables unique applications for rapid element analysis under harsh conditions where other techniques are not available. We present several examples of LIBS-based sensors that are applied in-line and at-line of industrial production processes.

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Femtosecond laser-induced breakdown spectroscopy: Elemental imaging of thin films with high spatial resolution

Cited by 20 publications

References 59 publications

Femtosecond Single-Pulse and Orthogonal Double-Pulse Laser-Induced Breakdown Spectroscopy (LIBS): Femtogram Mass Detection and Chemical Imaging with Micrometer Spatial Resolution

Femtosecond Single-Pulse and Orthogonal Double-Pulse Laser-Induced Breakdown Spectroscopy (LIBS): Femtogram Mass Detection and Chemical Imaging with Micrometer Spatial Resolution

Laser-Induced Breakdown Spectroscopy Imaging for Material and Biomedical Applications: Recent Advances and Future Perspectives

Review of Element Analysis of Industrial Materials by In-Line Laser—Induced Breakdown Spectroscopy (LIBS)

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