Femtosecond laser-induced shockwave formation on ablated silicon surface

Abstract

Articles you may be interested inThe origins of pressure-induced phase transformations during the surface texturing of silicon using femtosecond laser irradiation J. Appl. Phys. 112, 083518 (2012); 10.1063/1.4759140 The role of asymmetric excitation in self-organized nanostructure formation upon femtosecond laser ablation AIP Conf. Proc. 1464, 428 (2012); 10.1063/1.4739897 Laser-induced damage threshold of silicon in millisecond, nanosecond, and picosecond regimes Absence of amorphous phase in high power femtosecond laser-ablated silicon Appl. Phys. Lett. 94, 011111 (2009); 10.1063/1.3052693Removal of small particles on silicon wafer by laser-induced airborne plasma shock waves This paper reports an experimental study of the vapor plume and shockwave propagation generated during femtosecond laser ablation. An Yb-doped fiber amplified/oscillator laser with 1030 nm wavelength and pulse repetition rate up to 26 MHz was used to ablate a blank silicon substrate in an ambient air environment. The interaction of internal and external shockwaves with the sample surface was found to cause raised spherical rims around the central ablation regime within the crater. Rims formed by primary and secondary shockwaves can be clearly observed. Analysis of the rim formation is studied in detail.

Dynamics of plasma expansion and shockwave formation in femtosecond laser-ablated aluminum plumes in argon gas at atmospheric pressures

“…The generation of shockwaves in the plume is reported in many studies. [26][27][28][29] The primary shock waves which propagate through the ambient gas and secondary shock waves formed in the plume's region were reported in the theoretical study of the temporal and special evolution of the plume expanding into an ambient gas. 14 The internal and external shockwaves in the plume generated by a ns laser pulse in air at 1 atmosphere (atm) are revealed using shadowgraph experiments and gas-dynamic model with radiative heat transfer.…”

“…27 The formation of raised spherical rims by shockwaves within a crater on the silicon surface in an ambient air environment ablated by a fs-pulse was observed in an experimental study. 28 Due to the complexity of the LA process, comprehensive experimental and computational methods are required to be used for its studies. To the best of our knowledge, a comparison of plasma expansion and shockwave formation in plumes produced by ns-pulse and fs-pulse lasers in an ambient gas at atmospheric pressure was not reported in details.…”

Mechanisms of damage formation in glass in the process of femtosecond laser drilling

“…This unwanted damage occurs as a by-product of the ablation of the material due to high-intensity laser pulses. The main factors contributing to the individual types of damage caused by a single laser shot have been studied extensively [8][9][10][11][12][13][14][15][16]; the shock originating from the photoexcited region generates microscopic cracks, while the high heat leads to modifications in the material. Meanwhile, the damage caused by repeated application of laser beams has been investigated mainly from the aspect of excited electrons [17,18].…”

Polarization dependent micro-structuring of silicon with a femtosecond laser

“…Rim formation around an ablation crater was observed in silicon with ns [29] and fs laser irradiation [30,31], and in glass [32] irradiated with a single femtosecond laser pulse. However, polarization dependent rim formation was never observed.…”