Femtosecond laser microstructuring of diamond-like nanocomposite films

Zavedeev, E. V.; Zilova, O. S.; Баринов, А. Д.; Shupegin, M. L.; Arutyunyan, N. R.; Jaeggi, B.; Neuenschwander, Beat; Pimenov, S.M.

doi:10.1016/j.diamond.2017.02.003

Cited by 36 publications

(21 citation statements)

References 30 publications

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“…The Raman scattering spectrum (Figure b) of the DLC‐0 sample is consistent with similar spectra reported in other studies describing amorphous hydrogenated DLC films (a‐C:H) . The peak at 1535 cm −1 in the DLC‐0 Raman scattering spectrum and the shoulder at around 1400 cm −1 are commonly attributed to G peak (bond stretching vibration of all pairs of sp 2 carbon atoms) and D peak (shoulder at lower wavenumbers related to the breathing vibration modes of sp 2 bonded rings).…”

Section: Resultssupporting

confidence: 87%

Tailoring of Silver Nanoparticle Size Distributions in Hydrogenated Amorphous Diamond‐Like Carbon Nanocomposite Thin Films by Direct Femtosecond Laser Interference Patterning

et al. 2019

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Patterning of nanocomposites by conventional lithography processes is problematic due to the different physical properties of matrix and filler. Direct laser interference patterning (DLIP) promises rapid micromachining of virtually any material with subwavelength resolution. A control of intense laser light modifies the filler particle size distribution in nanocomposite films. Herein, DLIP of periodic patterns with half‐pitch <1 μm in reactive magnetron‐sputtered hydrogenated amorphous diamond‐like carbon nanocomposite thin films with embedded silver nanoparticles (DLC:Ag) is demonstrated. Periodic patterns of regularly repeating areas with modified size distributions of silver nanoparticles are obtained by a variation of fluences and number of pulses of 515 nm wavelength femtosecond laser. Depending on the silver content in nanocomposite films, nanoparticle size distributions are either bimodal (for 14.1 at% Ag containing films) or unimodal (7.9 at%) with effective average diameters shifting from 13 to 69 nm, depending on the laser processing parameters. The importance of localized surface plasmon absorption and localized field enhancement at the DLC–Ag interface for lowering the ablation threshold of DLC:Ag nanocomposites below 6 mJ cm−2 at 1000 pulses is demonstrated. This is at least four times lower than the threshold for pure DLC obtained using the same DLIP setup.

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Section: Resultssupporting

confidence: 87%

Tailoring of Silver Nanoparticle Size Distributions in Hydrogenated Amorphous Diamond‐Like Carbon Nanocomposite Thin Films by Direct Femtosecond Laser Interference Patterning

et al. 2019

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“…Laser technique is widely used to change electrical, tribological, and nanomechanical properties of diamond‐like carbon films for their use in different applications. So the necessity arises to choose the laser source and the parameters of irradiation to achieve appropriate properties of the laser‐modified DLC films.…”

Section: Introductionmentioning

confidence: 99%

Raman Spectroscopy of Amorphous Carbon Films Modified by Single‐Pulse Irradiation of Nanosecond and Femtosecond Lasers

Arutyunyan

Комленок

Zavedeev

et al. 2017

Physica Status Solidi (b)

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Structural modifications of tetrahedral amorphous carbon (ta-C) films, caused by single-pulse laser irradiation, were investigated. Graphitization of the films, content and size of sp 2 carbon clusters were analyzed by means of Raman spectroscopy. It has been shown that pulse duration, as well as laser fluence and wavelength of irradiation, strongly influence the processes of graphitization and ablation of the ta-C films. In particular, heating of the films by the laser beam leads to formation of sp 2 carbon clusters and their enlargement up to the size of several nanometers. Material transformation to graphitized fraction is much more efficient in case of ns pulse duration. In case of fs pulse duration, such factors as multiphoton absorption and evaporation of over-heated material from the surface at high laser fluence, shorter time of irradiation, and heat transfer to the inner layers of the film lead to relatively weak graphitization characterized by the maximum size of the sp 2 carbon clusters of about 1 nm.

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“…Необходимость ВЧ смещения обусловлена хорошими диэлектрическими свойствами пленки. Имеется много работ по исследованию влияния амплитуды ВЧ напряжения на структуру и свойства получаемых a-C : H : SiO x -пленок [10,17].…”

Section: Introductionunclassified

Зависимость механических и трибологических свойств a-C : H : SiO-=SUB=-x-=/SUB=--пленок от амплитуды напряжения смещения подложки

Grenaderov¹,

Soloviov²,

Оскомов³

et al. 2021

Журнал Технической Физики

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The paper presents the AISI 316L stainless steel surface modification by plasma-assisted chemical vapor deposition of a-C:H:SiOx film using the pulsed bipolar substrate bias voltage. The mechanical and tribological properties of the a-C:H:SiOx film and the steel surface are examined using the nanoindentation method and the pin-on-disk tribometer, respectively. The optimum value is obtained for the amplitude of the negative pulse of the bipolar bias voltage, when the hardness of the a-C:H:SiOx film is high (19±2 GPa). This hardness value is 3.5 times greater, than the hardness of the AISI 316L steel surface (5.5±0.1 GPa). At the same time, the coefficient of friction of the film is low (0.08), which is 9 times lower than that of the steel (0.72). The wear rate values are found to be 8.5×10-7 and 3.7×10-5 mm3N-1m-1 for the coated and uncoated steel, respectively. The structure and composition of the obtained films are studied by Raman spectroscopy and scanning electron microscopy.

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Femtosecond laser microstructuring of diamond-like nanocomposite films

Cited by 36 publications

References 30 publications

Tailoring of Silver Nanoparticle Size Distributions in Hydrogenated Amorphous Diamond‐Like Carbon Nanocomposite Thin Films by Direct Femtosecond Laser Interference Patterning

Tailoring of Silver Nanoparticle Size Distributions in Hydrogenated Amorphous Diamond‐Like Carbon Nanocomposite Thin Films by Direct Femtosecond Laser Interference Patterning

Raman Spectroscopy of Amorphous Carbon Films Modified by Single‐Pulse Irradiation of Nanosecond and Femtosecond Lasers

Зависимость механических и трибологических свойств a-C : H : SiO-=SUB=-x-=/SUB=--пленок от амплитуды напряжения смещения подложки

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