t.v. kononenko 1,u m. meier 2 m.s. komlenok 1 s.m. pimenov 1 v. romano 2 v.p. pashinin 1 v.i. konov 1

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This paper reports the analysis of the intensity of diamond line in the Raman spectra of laser modified layers with different thickness on a diamond surface. Since the diamond line passing from substrate through the absorbing layer of moderate thickness can be registered, the thickness of local area is estimated from its micro‐Raman spectra. The comparison between Raman scattering and direct observation of the graphitized layer by transmission electron microscopy shows that Raman spectroscopy can be used as an alternative non‐destructive method for measuring a moderate thickness of graphitized layers.